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54 Technical Manufacturing Corporation 978-532-6330 800-542-9725 (Toll Free) Fax: 978-531-8682 sales@techmfg.com www.techmfg.com Advanced ProductsSTACI (continued) Provides greater than 90% isolation at frequencies greater than 2 Hz, vertical and horizontal Reduces fab floor construction costs, allows tools to be installed in higher vibration environments Active bandwidth, 0.6 Hz to 250 Hz Recommended by many tool manufacturers 6 degree-of-freedom active hard mount design, no soft air suspension Installs easily, robust control system requires minimal or no on-site compensation A point-of-use solution that is compatible with all internal tool vibration isolation systems Ensures tool vibration criteria will be met as fab vibration levels increase over time Uses TMC's patented STACIS ® technology to cancel vibration using piezoelectric actuators Enables older and noisier floors to accommodate state-of-the-art tools Compatible with various floor heights and sub-floor geometries Increases throughput, quality and yield STACIS ® isolating a Varian NMR SpectrometerSTACIS ® 2100 on a riser installed under a TMC platform in a 40" tall raised floor Catalog Number Description Pricing 21-301-01 Stacis, 3-mount, low capacity Contact TMC 21-301-02 Stacis, 3-mount, medium capacity 21-301-03 Stacis, 3-mount, high capacity 21-401-01 Stacis, 4-mount, low capacity 21-401-02 Stacis, 4-mount, medium capacity 21-401-03 Stacis, 4-mount, high capacity How to Order Stacis ® Ordering Chart Features & Benefits
55Technical Manufacturing Corporation 978-532-6330 800-542-9725 (Toll Free) Fax: 978-531-8682 sales@techmfg.com www.techmfg.com 3 4 The 45 nanometer line-width test patterns shown were produced with an advanced Immersion Lithography System manufactured by Amphibian Systems and installed at SEMATECH in Austin, Texas. Variation between the images is due to the effect of seismic vibration on the photolithography process. The images shown were obtained using a scanning electron microscope. Elastomer version of pedestal (green) Rigid version of pedestal (white) STACIS version of pedestal (blue) VIBRATION LEVELS STACIS and Non-STACIS Pedestals 125 µin/sec tool spec (red) APPLICATION NOTE Impact of Vibration on Advanced Immersion Lithography (actual customer supplied data) With STACIS ® ... Pattern achieved with STACIS active vibration isolation. Photos, images, and vibration data courtesy of SEMATECH. 45 nm L/S45 nm L/S Without STACIS ® ... Best pattern obtained on either the elastomer or rigid version of original pedestal. * The tool was initially installed on a steel and concrete plinth with a steel support structure which incorporated commercial elastomer vibration isolation pads. This pedestal did not achieve the tool's specified vibration criteria and pattern quality was poor. In an attempt to reduce vibration, the elastomer pads were effectively shorted out with metal shims leading to a more rigid, non-resonant structure but this resulted in little improvement. The vibration criteria were not met with either version of the pedestal and pattern quality remained poor. The plinth support structure was removed and retrofitted with a STACIS ® Active Piezoelectric Vibration Cancell- ation System. The Stacis mounts were placed directly beneath the existing plinth. Supporting the tool on Stacis resulted in a dramatic reduction of overall seismic vibration levels and achievement of the manufacturer's floor vibration specification. More importantly, Stacis provided a dramatic improvement in pattern quality. *Vertical Axis Data shown
978-532-6330800-542-9725TollFreewww.techmfg.com, in.mmin.mm, in.mmin.mm, thenpositionedtowithinH110070.001in.in, in.mmin.mm, in.mmin.mm, 978-532-6330800-542-9725TollFreewww.techmfg.com,
www.publitas.com, www.publitas.nl
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