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© Physik Instrumente (PI) GmbH & Co. KG 2008. Subject to change without notice. All data are superseded by any new release. The newest release for data sheets is available for download at www
.pi.ws. Cat120E Inspirations2009 08/10.18
Piezo Nano Positioning
P-612 XY Piezo Nanopositioning System
Compact, Clear Aperture
The P-612.2SL is a piezo-based
nanopositioning system featur-
ing a compact footprint of only
60 x 60 mm and a height of
18 mm. Due to the 20 x 20 mm
open aperture, the system is
excellently suited for sample
positioning in microscopy or
scanning applications. Equip p ed
with piezo drives and zero-stic-
tion, zero-friction flexure guid-
ing system, the series provides
nanometer-range resolution and
millisecond response time. A Z
stage with the same form factor
is available for vertical position-
ing applications (see P-612.ZSL
p. 2-36).
Cost-Effective Design
Flexures optimized with Finite
Element Analysis (FEA) are used
to guide the compact, low-cost
stage. Flexures allow extremely
high-precision motion, no mat-
ter how minute, as they are
completely free of play and fric-
tion. They also optimize stiff-
ness in and perpendicular to the
direction of motion.
Position Servo-Control with
Nanometer Resolution
High-resolution, broadband,
strain gauge sensors (SGS) are
applied to appropriate locations
on the drive train and measure
the displacement of the moving
part of the stage relative to the
base directly. The SGS sensors
assure optimum position stabili-
ty in the nanometer range and
fast response.
The open-loop models are ideal
for applications where fast
response and very high resolu-
tion are essential, but absolute
positioning is not important.
They can also be used in appli-
cations where the position is
controlled by an external linear
position sensor such as an inter-
ferometer, a PSD (position sen-
sitive diode), CCD chip / image
processing system, or the eyes
and hands of an operator.
Ceramic Insulated Piezo
Actuators Provide Long
Lifetime
Highest possible reliability is
assured by the use of award-
winning PICMA
®
multilayer
piezo actuators. PICMA
®
actua-
tors are the only actuators on
the market with ceramic-only
insulation, which makes them
resistant to ambient humidity
and leakage-current failures.
They are thus far superior to
conventional actuators in relia-
bility and lifetime.
Ordering Information
P-612.2SL
XY Nanopositioning System with
20 x 20 mm Aperture, 100 x 100 µm,
Strain Gauge Sensors
P-612.20L
XY Nanopositioning System with
Aperture 20 x 20 mm, 100 x 100 µm,
Open-Loop
P-612.2SL XY piezo stage (CD for size comparison)
L52159 Compact: Footprint 60 x 60 mm
L52159 100 x 100 µm Closed-Loop Travel Range
(130 x 130 Open-Loop)
L52159 For Cost-Sensitive Applications
L52159 Clear Aperture 20 x 20 mm
L52159 Parallel-Kinematics for Enhanced
Responsiveness / Multi-Axis Precision
L52159 Outstanding Lifetime Due to PICMA
®
Piezo Actuators
L52159 Z-Stage Also Available
System properties
System configuration P-612.2 SL and E-500 modular system
with E-503 amplifier and E-509 sensor
module, 100 load
Amplifier bandwidth, small signal 45 Hz
Settling time (10 % step width) 15 ms
P-612.2 dimensions in mm
2-59
Piezo Nano Positioning
Piezo Flexure Stages /
High-Speed Scanning Systems
Nanopositioning / Piezoelectrics
Linear Actuators & Motors
Fast Steering Mirrors /
Active Optics
Piezo Drivers /
Servo Controllers
Piezoelectrics in Positioning
Nanometrology
Micropositioning
Linear
Vertical & Tip/Tilt
2- and 3-Axis
6-Axis
Single-Channel
Multi-Channel
Modular
Accessories
Index
Technical Data
Model P-612.2SL P-612.20L Units Tolerance
Active axes X, Y X, Y
Motion and positioning
Integrated sensor SGS
Open-loop travel, -20 to +120 V 130 130 µm min. (+20 %/-0 %)
Closed-loop travel 100 µm
Open-loop resolution 0.8 0.8 nm typ.
Closed-loop resolution 5 nm typ.
Linearity 0.4 % typ.
Repeatability <10 nm typ.
Pitch ±10 ±10 µrad typ.
Yaw in X/ Y ±10 / ±50 ±10 / ±50 µrad typ.
Mechanical properties
Stiffness 0.15 0.15 N/µm ±20 %
Unloaded resonant frequency 400 400 Hz ±20 %
Resonant frequency @ 100 g 200 200 Hz ±20 %
Push/pull force capacity in motion direction 15 / 5 15 / 5 N Max.
Load capacity 15 15 N Max.
Drive properties
Ceramic type PICMA
®
P-885 PICMA
®
P-885
Electrical capacitance 1.5 1.5 µF ±20 %
Dynamic operating current coefficient 1.9 1.9 µA/(Hz µm) ±20 %
Miscellaneous
Operating temperature range -20 to 80 -20 to 80 °C
Material Aluminum, steel Aluminum, steel
Mass 105 105 g ±5 %
Cable length 1.5 1.5 m ±10 mm
Sensor connector LEMO connector
Voltage connection LEMO connector LEMO connector
Resolution of PI Piezo Nanopositioners is not limited by friction or stiction. Noise equivalent motion with E-503 amplifier (p. 2-146)
Recommended controller
Single-channel (1 per axis): E-610 servo-controller / amplifier (p. 2-110) , E-625 servo-controller, bench-top (p. 2-114), E-621 controller module (p. 2-160)
Multi-channel: modular piezo controller system E-500 (p. 2-142) with amplifier module E-503 (three channels) (p. 2-146) or E-505 (1 per axis, high-power)
(p. 2-147) and E-509 controller (p. 2-152)
P-612 are available as XY-scanners (P-612.2SL, on the left) and
vertical stages (P-612.ZSL, on the right) providing a travel
range of 100 µm per axis
www.pionline.it, www.pifrance.fr, www.pi-china.cn, www.goa-tech.co.il, www.alt.nl, www.bfioptilas.es, www.pi.ws, www.piceramic.de, www.pi-usa.us, www.pi-usa.us, www.pi-japan.jp, www.pi-japan.jp, www.physikinstrumente.co.uk, www.dyneos.ch, www.parameter.se, dms@deepms.com, www.deepms.com, www.warsash.com.au, www.parameter.se, www.eliovac.com.ar, www.rsdobrasil.com.br, www.woojoohitech.com, www.cairnhill.com, www.tetmakina.com, Seewww.piceramic.com, Seep.1-94ff.andwww.piceramic.com, Seewww.piceramic.com, Seealsowww.piceramic.com, andoscillatingmotione.g.in, info@pi-usa.us, www.pi-usa.us, info@pi-usa.us, www.pi-usa.us, info@pi-japan.jp, www.pi-japan.jp, info@pi-japan.jp, www.pi-japan.jp, info@pi-china.cn, www.pi-china.cn, info@pifrance.fr, www.pifrance.fr, uk@pi.ws, www.physikinstrumente.co.uk, info@pionline.it, www.pionline.it, info@piceramic.de, www.piceramic.de,
www.publitas.com, www.publitas.nl
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