pi2009
A-15
Piezo Nano Positioning
PIInnovation is a Tradition
In the course of the last four
decades, PI has become the
leading manufacturer of nano-
positioning technology.
In the 70s, as space exploration
and laser technology stimulat-
ed optics research, PI intro-
duced piezo actuators which
gave scientists the highest
positioning precision then
available.
In the 80s, as the development
of the microcomputer led to
the first semi-conductor boom
and ongoing miniaturization of
electronic structures, PI intro-
duced nanopositioning sys-
tems tailor-made for the tasks
involved.
The fall of the Berlin Wall
marked the end of the Cold
War and made the 90s the
opening of a new era of bound-
less communications. For PI
also, this meant the opening of
new horizons with the founding
of the PI Ceramic subsidiary in
the former East Germany. A
main focus in technology was
Photonics, where precision
positioning of optical fibers and
fiber-arrays boomed.
The turn of the century brought
global progress in nanotech-
nology, which finds its first
commercialisation in semicon-
ductor manufacturing and
inspection, and biotechnolo-
gyall fields where smaller
and more precise are keys to
success.
PI also offers the appropriate
solutions for tasks in these
areas with ever faster and
more precise nanometer posi-
tioning, stabilization and auto-
mation.
70s
L52159 First commercially
available piezoelectric
translators
L52159 First piezo translators with
preloading, for industrial
applications
80s
L52159 First commercially
available closed-loop
piezo actuators
L52159 First nanopositioning
systems with flexure
guidance and piezo drive
L52159 First fiber positioning sys-
tems with hybrid drives
L52159 First preloaded actuators
with monolithic low-volt-
age piezos
L52159 Computer controlled
nanopositioning systems
L52159 First closed-loop image-
stabilization platforms
90s
L52159 First high-level dynamics
nanofocusing system with
frictionless guidance
L52159 First two-plate capacitive
sensors and controller
with integrated lineariza-
tion for subnanometer
accuracy
L52159 First piezo nanoposition-
ing systems with parallel
metrology and parallel
kinematics
L52159 First piezo-driven tool
servo
L52159 PI becomes first nanoposi-
tioning systems supplier
manufacturing its own
piezoceramics
L52159 First Hexapod 6 DOF
positioning system with
submicron resolution
L52159 First fully automatic fiber
alignment system with
high-resolution Piezo-
Walk
®
linear motor
L52159 First piezo nanoposition-
ing stage with active
6D guidance
L52159 First automated 6D fiber
alignment system with
fully virtualized center of
rotation
L52159 First piezo controller with
InputShaping
®
vibration
suppression
L52159 First digital piezo con-
troller with fiber optic
interface
2000 +
L52159 First multi-layer piezo
actuators with ceramic
encapsulation for longer
lifetime and zero-out-
gassing for vacuum
operation: PICMA
®
L52159 First piezomotor miniature
drives in mass production
for manipulation of small
opto-mechanical compo-
nents
L52159 Patented PILine
®
compact
ultrasonic piezomotors
and drives to replace
classical motor-spindle
configurations
L52159 Patented PiezoWalk
®
high-
resolution, high-load-piezo
linear stepping drives:
NEXLINE
®
, NEXACT
®
L52159 First digital 6-axis piezo
controller with coordinate
transformation
L52159 First piezo controller
with Dynamic Digital
Linearization (improves
linearity by up to 1000
times)
L52159 First high-level dynamics,
two-axis scanning mirror
with closed-loop piezo
drive and 100 mrad beam
deflection range
L52159 Fastest closed-loop XY
nanopositioning stages
with large aperture for
scanning microscopy
L52159 Scanning stages with
<1 nm guiding accuracy
in multiple axes
A-16
©
Physik
Instrumente
(PI)
GmbH
&
Co.
KG
2008.
Subject
to
change
without
notice.
Cat120E
Inspirations2009
08/10.18
Piezo Nano Positioning
Application PI Solution Typical PI Products*
N-214 N-215 NEXLINE
®
Linear Motor / Actuator, p. 1-10
P-587 6-Axis Precision Piezo Stage, p. 2-76
P-561·PIMars XYZ Piezo System, p. 2-72
P-721 PIFOC
®
Objective Piezo Nanopositioner, p. 2-26
Piezo Linear Motors,
Multiaxis-Piezo
Nanopositioning Stages
Piezo Actuators
PIFOC
®
Nanofocusing Devices
Nanoimprint
CD Testing
Mask and Wafer Alignment
Objective Precision Positioning
Lithography
Wafer Inspection
Nanometrology
See Examples on p. A-22
Interferometry
Closed-Loop Piezo Actuators and
Flexure-Guided Systems
P-725 PIFOC
®
Long-Travel Objective Scanner, p. 2-28
P-753 LISA Linear Actuator & Stage, p. 2-16
P-752 High Precision Nanopositioner, p. 2-18
P-620.1 P-629.1 PIHera
®
Piezo Linear Stage, p. 2-22
Wire Bonding Piezo Bender Actuators PL112 · PL140 PICMA
®
Bender Actuators, p. 1-94
Sub-nm Measurements
(Nanometrology)
D-015 · D-050 · D-100 Capacitive Sensors, p. 3-14
D-510 PISeca Single Probe Capacitive Sensors, p. 3-8
Single and Dual Probe Capacitive
Position Sensors
M-824 Compact 6-Axis-Positioning System, p. 4-10
M-850 Hexapod 6-Axis Positioning System, p. 4-6
F-206.S HexAlign 6 Axis-Hexapod, p. 4-12
N-515 Non Magnetic Piezo Hexapod, p. 1-17
Optics Testing / 6-Axis Alignment
Hexapod 6D Parallel-Kinematics
Micropositioning Systems
Semiconductor Technology
Applications
Moore's Law keeps com-
pressing IC line widths and fea-
ture-sizes. In order to keep up,
nanopositioning mechanisms
and precision motion control
systems embedded in front-
end production and metrology
tools must provide 10 to 1000x
higher precision than feature
size. Vibrations, position errors
and drift need to be controlled
to <0.1 nm (atom diameter).
Conventional positioning sys-
tems do not provide the
required stability and preci-
sion.
PI offers a wide variety of piezo
based solutions from long-life
PZT ceramics for vibration can-
cellation to the ultra-high-
performance NEXLINE
®
long-
travel nanopositioning piezo
motors.
Other precision motion pro-
ducts include piezo tilt plat-
forms for fast beam stabiliza-
tion / correction, piezo flexure
stages for nanometrology
applications, nanoalignment
systems for mask alignment,
and the new hybrid long-travel
nanopositioning translation
stages for linear and vertical
positioning.
PI's capacitive nanometrology
sensors measure motion down
to the sub-nanometer range
with very high bandwidth.
*Other standard or custom solutions from PI could be even more suitable for your application. Talk to a PI Applications Engineer or visit www.pi.ws.
www.pionline.it, www.pifrance.fr, www.pi-china.cn, www.goa-tech.co.il, www.alt.nl, www.bfioptilas.es, www.pi.ws, www.piceramic.de, www.pi-usa.us, www.pi-usa.us, www.pi-japan.jp, www.pi-japan.jp, www.physikinstrumente.co.uk, www.dyneos.ch, www.parameter.se, dms@deepms.com, www.deepms.com, www.warsash.com.au, www.parameter.se, www.eliovac.com.ar, www.rsdobrasil.com.br, www.woojoohitech.com, www.cairnhill.com, www.tetmakina.com, Seewww.piceramic.com, Seep.1-94ff.andwww.piceramic.com, Seewww.piceramic.com, Seealsowww.piceramic.com, andoscillatingmotione.g.in, info@pi-usa.us, www.pi-usa.us, info@pi-usa.us, www.pi-usa.us, info@pi-japan.jp, www.pi-japan.jp, info@pi-japan.jp, www.pi-japan.jp, info@pi-china.cn, www.pi-china.cn, info@pifrance.fr, www.pifrance.fr, uk@pi.ws, www.physikinstrumente.co.uk, info@pionline.it, www.pionline.it, info@piceramic.de, www.piceramic.de,
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