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© Physik Instrumente (PI) GmbH & Co. KG 2008. Subject to change without notice. All data are superseded by any new release. The newest release for data sheets is available for download at www
.pi.ws. Cat120E Inspirations2009 08/10.18
Piezo Nano Positioning
P-612.Z Piezo Z Stage
Compact Nanopositioning Stage with Aperture
These elevation stages are
cost-effective, compact, piezo-
based positioning systems
with travel ranges of 100 µm.
The space-saving design fea-
tures a footprint of only 60 x 60
mm. The 20 x 20 mm clear
aperture makes them ideally
suited for sample positioning
in microscopy. Equipped with
PICMA
®
piezo drives and zero-
stiction, zero-friction flexure
guiding system, the series pro-
vides nanometer-range reso -
lution and millisecond res -
ponse time.
Position Servo-Control with
Nanometer Resolution
High-resolution, broadband,
strain gauge sensors (SGS) are
applied to appropriate loca-
tions on the drive train and
measure the displacement of
the moving part of the stage
relative to the base. The SGS
sensors assure optimum posi-
tion stability in the nanometer
range and fast response.
The open-loop models are
ideal for applications where
fast response and very high
resolution are essential, but
absolute positioning is not
important. They can also be
used when the position is con-
trolled by an external sensor
such as an interferometer, a
PSD (position sensitive detec-
tor), CCD chip / image process-
ing system, or the eyes and
hands of an operator.
High Reliability and Long
Lifetime
The compact P-612 systems
are equipped with preloaded
PICMA
®
high-performance
piezo actuators which are inte-
grated into a sophisticated,
FEA-modeled, flexure guiding
system. The PICMA
®
actuators
feature cofired ceramic encap-
sulation and thus provide bet-
ter performance and reliability
than conventional piezo actua-
tors. Actuators, guiding system
and sensors are maintenance-
free, not subject to wear and
offer an extraordinary reliabili-
ty.
L52159 Travel Range 100 µm
L52159 Resolution to 0.2 nm
L52159 Linearity 0.2 %
L52159 Compact: Footprint 60 x 60 mm
L52159 Very Cost-Effective Controller/Piezomechanics Systems
L52159 Frictionless, High-Precision Flexure Guiding System
L52159 Outstanding Lifetime Due to PICMA
®
Piezo Actuators
P-612s are available as XY-scanners (P-612.2SL, on the left)
and vertical stages (P-612.ZSL, on the right)
providing a travel range of 100 µm per axis
Application Examples
L52159 Interferometry
L52159 Scanning microscopy
L52159 Nanopositioning
L52159 Biotechnology
L52159 Quality assurance testing
L52159 Semiconductor fabrication
P-612.ZSL
compact nano-elevation stage with a
20 mm x 20 mm clear aperture
Ordering Information
P-612.ZSL
Vertical Nanopositioning Stage,
100 µm, 20 x 20 mm Aperture,
SGS-Sensor
P-612.Z0L
Vertical Nanopositioning Stage,
100 µm, 20 x 20 mm Aperture,
No Sensor
Settling takes less than 10 ms over the entire travel range in closed-loop operation
2-39
Piezo Nano Positioning
Piezo Flexure Stages /
High-Speed Scanning Systems
Nanopositioning / Piezoelectrics
Linear Actuators & Motors
Fast Steering Mirrors /
Active Optics
Piezo Drivers /
Servo Controllers
Piezoelectrics in Positioning
Nanometrology
Micropositioning
Linear
Vertical & Tip/Tilt
2- and 3-Axis
6-Axis
Single-Channel
Multi-Channel
Modular
Accessories
Index
P-612.Z dimensions in mm
Technical Data
Model P-612.ZSL P-612.Z0L Units Tolerance
Active axes Z Z
Motion and positioning
Integrated sensor SGS
Open-loop travel, -20 to +120 V 110 110 µm min. (+20 %/-0 %)
Closed-loop travel 100 µm calibrated
Open-loop resolution 0.2 0.2 nm typ.
Closed-loop resolution 1.5 nm typ.
Linearity, closed-loop 0.2 % typ.
Repeatability ±4 nm typ.
Runout ?
X
, ?
Y
±10 ±10 µrad typ.
Crosstalk X, Y ±20 ±20 µm typ.
Mechanical properties
Stiffness in motion direction 0.63 0.63 N/µm ±20 %
Unloaded resonant frequency 490 490 Hz ±20 %
Resonant frequency under load 420 (30 g) 420 (30 g) Hz ±20 %
Load capacity 15 / 10 15 / 10 N Max.
Drive properties
Ceramic type PICMA
®
P-885 PICMA
®
P-885
Electrical capacitance 3 3 µF ±20 %
Dynamic operating current coefficient 3.8 3.8 µA/(Hz µm) ±20 %
Miscellaneous
Operating temperature range -20 to 80 -20 to 80 °C
Material Aluminum Aluminum
Mass 0.28 0.275 kg ±5 %
Cable length 1.5 1.5 m ±10 mm
Sensor / voltage connection LEMO LEMO (no sensor)
System properties
System configuration P-612.ZSL and E-625.SR
controller, 30 g load
Closed-loop amplifier 110 Hz
small signal bandwidth
Closed-loop amplifier 80 Hz
large signal bandwidth
Settling time (10 % step width) 8 ms
Resolution of PI Piezo
Nanopositioners is not
limited by friction or stic-
tion. Value given is noise
equivalent motion with
E-503 amplifier. (p. 2-146)
Recommended controller /
amplifier
E-610 servo controller /
amplifier card (p. 2-110),
E-625 servo-controller,
bench-top (p. 2-114), E-665
high-power servo-control-
ler with display, bench-top
(p. 2-116), E-660 bench-top
for open-loop systems
(p. 2-119)
www.pionline.it, www.pifrance.fr, www.pi-china.cn, www.goa-tech.co.il, www.alt.nl, www.bfioptilas.es, www.pi.ws, www.piceramic.de, www.pi-usa.us, www.pi-usa.us, www.pi-japan.jp, www.pi-japan.jp, www.physikinstrumente.co.uk, www.dyneos.ch, www.parameter.se, dms@deepms.com, www.deepms.com, www.warsash.com.au, www.parameter.se, www.eliovac.com.ar, www.rsdobrasil.com.br, www.woojoohitech.com, www.cairnhill.com, www.tetmakina.com, Seewww.piceramic.com, Seep.1-94ff.andwww.piceramic.com, Seewww.piceramic.com, Seealsowww.piceramic.com, andoscillatingmotione.g.in, info@pi-usa.us, www.pi-usa.us, info@pi-usa.us, www.pi-usa.us, info@pi-japan.jp, www.pi-japan.jp, info@pi-japan.jp, www.pi-japan.jp, info@pi-china.cn, www.pi-china.cn, info@pifrance.fr, www.pifrance.fr, uk@pi.ws, www.physikinstrumente.co.uk, info@pionline.it, www.pionline.it, info@piceramic.de, www.piceramic.de,
www.publitas.com, www.publitas.nl
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