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C
at120E
Inspirations2009
08/10.18
Piezo Nano Positioning
High-Dynamics, Very Stable Piezo Scanner with Extreme Guiding Accuracy
P-752 High Precision Nanopositioning Stage
P-752 series high-speed nano-
positioning stages are extre-
mely precise devices, provid-
ing a positioning and scanning
range up to 30 µm with very
rapid settling and extremely
low tip/tilt errors. These stages
were specially designed for
high-speed dithering and disk
drive testing applications.
Direct-Drive Design for Fastest
Response
The direct-drive design, toget-
her with careful attention to
mass minimization, results in
significant reduction in inertial
recoil forces applied to the
supporting structures, enhanc-
ing overall system response,
throughput and stability.
In combination with the
E-500 controller system the
P-752.11C stage with 300 g
load settles to better than 1 %
with less 10 msec.
P-752 stages are equipped with
capacitive sensors providing
sub-nanometer resolution and
stability. PI's proprietary capac-
itive sensors measure position
directly and without physical
contact. They are free of fric-
tion and hysteresis, a fact
which, in combination with the
positioning resolution of well
under 1 nm, makes it possible
to achieve very high levels of
linearity. Further advantages of
direct metrology with capaci-
tive sensors are the high phase
fidelity and the high bandwidth
of up to 10 kHz.
Automatic Configuration
The .CD versions are equip-
ped with an ID-chip that stores
all individual stage data and
servo-control parameters. This
data is read out automatically
by the AutoCalibration function
of PI's digital piezo controllers.
Thus, digital controllers and
nanopositioning stages with
ID-chip can be operated in any
combination.
Higher Precision in Periodic
Motion
The highest dynamic accuracy
in scanning applications is
made possible by the DDL
algorithm, which is available
in most of PI's modern digital
controllers. DDL eliminates
tracking errors, improving
dynamic linearity and usable
bandwidth by up to three
orders of magnitude!
High Reliability and Long
Lifetime
The compact P-752 systems
are equipped with preloaded
PICMA
®
high-performance pie-
zo actuators which are inte-
grated into a sophisticated,
FEA-modeled, flexure guiding
system. The PICMA
®
actuators
feature cofired ceramic encap-
sulation and thus offer better
performance and reliability
than conventional piezo actua-
tors. Actuators, guidance and
sensors are maintenance-free
and not subject to wear, and
thus offer an extraordinary reli-
ability.
L52159 0.1 nm Resolution, Fast Response
L52159 Travel to 35 µm
L52159 Capacitive Sensors for Highest Linearity
L52159 Flexure Guidance for Frictionless, Ultra-Straight Motion
L52159 Outstanding Lifetime Due to PICMA
®
Piezo Actuators
Application Examples
L52159 Disc-drive-testing
L52159 Metrology
L52159 Nanopositioning
L52159 Scanning microscopy
L52159 Photonics / integrated
optics
L52159 Interferometry
L52159 Biotechnology
L52159 Micromanipulation
Ordering Information
P-752.11C
High-Dynamics Piezo
Nanopositioning System, 15 µm,
Direct Metrology, Capacitive Sensor,
LEMO Connector
P-752.21C
High-Dynamics Piezo
Nanopositioning System, 30 µm,
Direct Metrology, Capacitive Sensor,
LEMO Connector
P-752.1CD
High-Dynamics Piezo
Nanopositioning System, 15 µm,
Direct Metrology, Capacitive Sensor,
Sub-D Connector
P-752.2CD
High-Dynamics Piezo
Nanopositioning System, 30 µm,
Direct Metrology, Capacitive Sensor,
Sub-D Connector
P-752.11C piezo nanopositioning system
Typical 0.5 µrad bidirectional trajectory repeatability (P-752.11C stage) means processes
may be performed bidirectionally for twice the productivity
2-18
2-19
Piezo Nano Positioning
Piezo Flexure Stages /
High-Speed Scanning Systems
Nanopositioning / Piezoelectrics
Linear Actuators & Motors
Fast Steering Mirrors /
Active Optics
Piezo Drivers /
Servo Controllers
Piezoelectrics in Positioning
Nanometrology
Micropositioning
Linear
Vertical & Tip/Tilt
2- and 3-Axis
6-Axis
Single-Channel
Multi-Channel
Modular
Accessories
Index
Technical Data
Model P-752.11C P-752.1CD P-752.21C P-752.2CD Units Tolerance
Active axes X X X X
Motion and positioning
Integrated sensor Capacitive Capacitive Capacitive Capacitive
Open-loop travel, -20 to +120 V 20 20 35 35 µm min. (+20 %/-0 %)
Closed-loop travel 15 15 30 30 µm calibrated
Closed-loop / open-loop resolution 0.1 0.1 0.2 0.2 nm typ.
Linearity, closed-loop 0.03 0.03 0.03 0.03 % typ.
Repeatability ±1 ±1 ±2 ±2 nm typ., full travel
Pitch / yaw ±1 ±1 ±1 ±1 µrad typ.
Mechanical properties
Stiffness in motion direction 30 30 20 20 N/µm ±20 %
Unloaded resonant frequency 3200 3200 2100 2100 Hz ±20 %
Resonant frequency @ 300 g 980 980 600 600 Hz ±20 %
Push/pull force capacity 100 / 10 100 / 10 100 / 10 100 / 10 N Max.
in motion direction
Load capacity 30 30 30 30 N Max.
Drive properties
Ceramic type PICMA
®
P-885 PICMA
®
P-885 PICMA
®
P-885 PICMA
®
P-885
Electrical capacitance 2.1 2.1 3.7 3.7 µF ±20 %
Dynamic operating current coefficient 17 17 15 15 µA/(Hz µm) ±20 %
Miscellaneous
Operating temperature range -20 to 80 -20 to 80 -20 to 80 -20 to 80 °C
Material Stainless steel Stainless steel Stainless steel Stainless steel
Dimensions 66 x 40 x 13.5 66 x 40 x 13.5 84 x 40 x 13.5 84 x 40 x 13.5 mm
Mass 0.25 0.25 0.35 0.35 kg ±5 %
Cable length 1.5 1.5 1.5 1.5 m ±10 mm
Sensor / voltage connection LEMO Sub-D Special LEMO Sub-D Special
Resolution of PI Piezo Nanopositioners is not limited by friction or stiction. Value given is noise equivalent motion with E-503 (p. 2-146) amplifier.
Recommended controller / amplifier
LEMO connector: E-500 piezo controller system (p. 2-142) with E-505 high-power amplifier (p. 2-147) and E-509 servo module (p. 2-152)
Sub-D special connector: E-610 servo controller / amplifier (p. 2-110), E-625 servo controller, bench-top (p. 2-114), E-665 high-power display controller, bench-top
(p. 2-116), E-753 digital controller (p. 2-108)
Response of a P-752.11C to a square wave control signal with 3 nm amplitude shows
true sub-nm positional stability, incremental motion and bidirectional repeatability
(measured with E-501 & E-503.00 & E-509.C1 controller, bandwidth set to 240 Hz)
www.pionline.it, www.pifrance.fr, www.pi-china.cn, www.goa-tech.co.il, www.alt.nl, www.bfioptilas.es, www.pi.ws, www.piceramic.de, www.pi-usa.us, www.pi-usa.us, www.pi-japan.jp, www.pi-japan.jp, www.physikinstrumente.co.uk, www.dyneos.ch, www.parameter.se, dms@deepms.com, www.deepms.com, www.warsash.com.au, www.parameter.se, www.eliovac.com.ar, www.rsdobrasil.com.br, www.woojoohitech.com, www.cairnhill.com, www.tetmakina.com, Seewww.piceramic.com, Seep.1-94ff.andwww.piceramic.com, Seewww.piceramic.com, Seealsowww.piceramic.com, andoscillatingmotione.g.in, info@pi-usa.us, www.pi-usa.us, info@pi-usa.us, www.pi-usa.us, info@pi-japan.jp, www.pi-japan.jp, info@pi-japan.jp, www.pi-japan.jp, info@pi-china.cn, www.pi-china.cn, info@pifrance.fr, www.pifrance.fr, uk@pi.ws, www.physikinstrumente.co.uk, info@pionline.it, www.pionline.it, info@piceramic.de, www.piceramic.de,
www.publitas.com, www.publitas.nl
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