pi2009
1-106
© Physik Instrumente (PI) GmbH & Co. KG 2008. Subject to change without notice. Cat120E Inspirations2009 08/10.18
Piezo Nano Positioning
Operating voltage
For PICMA
®
ceramic equipped
piezo actuators: 0 to 100 V typ.
Max. recommended operating
voltage range is -20 to +120 V
(extremes for short durations
only).
resolution, the noise-equivalent
mo tion is specified. Values are
typical results (RMS, 1 ?),
measured with E-503/E-508
amplifier module in E-500/501
chassis.
Notes on Specifications for Piezo Actuators and Components
Static large-signal stiffness
Typical tolerance ±20 %. Static
large-signal stiffness of the
stage in operating direction at
room temperature. Small-sig-
nal stiffness and dynamic stiff-
ness may differ because of
effects caused by the active
nature of piezoelectric material,
compound effects, etc. For
details see the tutorial Piezo -
electrics in Positioning Sec -
tion (see p. 2-189 ff )
Unloaded resonant frequency
Typical tolerance ±20 %. Low est
resonant frequency in operat-
ing direction (does not specify
the maximum operating fre-
quency). For details see the
tutorial Piezoelectrics in
Positioning Section (see p.
2-192 ff )
Push/pull force capacity
(in operating direction)
Specifies the maximum forces
that can be applied to the sys-
tem along the active axis.
Limited by the piezo ceramic
material and the flexure design.
If larger forces are applied,
damage to the piezo ceramic,
the flexures or the sensor can
occur. The force limit must also
be considered in dynamic
appli cations.
Example: the dynamic forces
generated by sinusoidal opera-
tion at 500 Hz, 20 µm peak-to-
peak, 1 kg moved mass, are
approximately ±100 N. For
details see the tutorial Piezo -
electrics in Positioning Sec -
tion (see p. 2-192 ff )
Shear force limit
Maximum lateral force orthog-
onal to the operating direction.
Limited by the piezo ceramics.
Mechanical Properties
Performance specifications are
valid for room temperature
(22 ±3 °C) and closed-loop sys-
tems are calibrated at this tem-
perature (specifications for dif-
ferent operating temperatures
on request). Recalibration is
recommended for operation at
a significantly higher or lower
temperature. Custom designs
for ultra-low or ultra-high tem-
peratures on request.
Integrated feedback sensor
Absolute measuring capacitive
and SGS sensors are used to
provide position information to
the controller. For details see
the tutorial Piezoelectrics in
Positioning Section (see p.
2-187 ff ).
Open-loop travel for PICMA
®
Ceramic Equipped Piezo
Stages and Actuators
Minimum open-loop travel at
0 to 100 V operating voltage.
Open-loop travel for PICA
Ceramic Equipped Piezo
Actuators
Minimum open-loop travel of
high-voltage piezo actuators at
0 to +1000 V operating voltage.
Closed-loop travel for PICMA
®
Ceramic Equipped Piezo
Stages and Actuators
Travel provided in closed-loop
operation. PI piezo amplifiers
have an output voltage range
of -20 to +120 V or -30 to +135 V
to provide enough margin for
the servo-controller to compen-
sate for load changes, etc.
Open-loop / closed-loop
resolution
Resolution of piezo actuators is
basically infinitesimal because
it is not limited by
stiction or friction. Instead of
Motion and Positioning
For PICA ceramic equipped
piezo actuators: 0 to 1000 V typ.
Voltages in excess of +750 V
should not be applied for long
durations. Operation in the
range of -200 to +750 V is rec-
ommended for maximum life-
time and displacement.
For shear and bender type
piezo actuators, bipolar voltage
is applied, ranging from ±30 V
up to ±250 V typ.
Torque limit (on tip)
Maximum torque that can be
applied before damage occurs.
Limited by the piezo ceramics.
1-107
Piezo Nano Positioning
DC-Servo & Stepper Actuators
Piezo Actuators & Components
PiezoWalk
®
Motors / Actuators
PILine
®
Ultrasonic Motors
Nanopositioning / Piezoelectrics
Linear Actuators & Motors
Unpackaged Stack Actuators
Guided / Preloaded Actuators
Nanometrology
Micropositioning
Patches /Benders/Tubes /Shear..
Index
Electrical capacitance
Typical tolerance ±20%. The
piezo capacitance values indi-
cated in the technical data
tables are typical small-signal
values (measured at 1 V,
1000 Hz, 20 °C, no load). Large-
signal values at room tempera-
ture are 30 to 50 % higher. The
capacitance of piezo ceramics
chan ges with amplitude, tem-
perature, and load, up to 200 %
of the unloaded, small-signal
capacitance at room tempera-
ture. For detailed information
on power requirements, refer
to the amplifier frequency-
re sponse graphs in the Piezo
Drivers / Servo Controllers (p.
2-99 ff ) Section of this catalog.
Dynamic Operating Current
Coefficient (DOCC)
Typical tolerance ±20 %. Ave -
rage electrical current (supplied
by the amplifier) required to
drive a piezo actuator per unit
frequency and unit displace-
ment (sine-wave operation).
For example to find out if a
selected amplifier can drive a
given piezo stage at 50 Hz with
30 µm amplitude, multiply DOC
coefficient by 50 x 30 and check
if the result is smaller or equal
to the output current of the
selected amplifier. For details
see the tutorial Piezoelectrics
in Positioning Section (p.
2-195 ff ).
Drive Properties
Operating temperature range
The temperature range indi-
cates where the piezo actuator
may be operated without dam-
age. Nevertheless, recalibra-
tion or zero-point-adjustment
may be required if the system
is operated at different temper-
atures. Performance specifica-
tions are valid for room tem-
perature range.
Material
Housings are usually made of
stainless steel. Small amounts
of other materials may be used
internally (for spring preload,
piezo coupling, mounting, ther-
mal compensation, etc.).
Al: Aluminum
N-S: Non-magnetic stainless
steel
S: Ferromagnetic stainless
steel
I: Invar
T: Titanium
See also Options and Acces -
sories (p. 1-102 ff ).
Miscellaneous
www.pionline.it, www.pifrance.fr, www.pi-china.cn, www.goa-tech.co.il, www.alt.nl, www.bfioptilas.es, www.pi.ws, www.piceramic.de, www.pi-usa.us, www.pi-usa.us, www.pi-japan.jp, www.pi-japan.jp, www.physikinstrumente.co.uk, www.dyneos.ch, www.parameter.se, dms@deepms.com, www.deepms.com, www.warsash.com.au, www.parameter.se, www.eliovac.com.ar, www.rsdobrasil.com.br, www.woojoohitech.com, www.cairnhill.com, www.tetmakina.com, Seewww.piceramic.com, Seep.1-94ff.andwww.piceramic.com, Seewww.piceramic.com, Seealsowww.piceramic.com, andoscillatingmotione.g.in, info@pi-usa.us, www.pi-usa.us, info@pi-usa.us, www.pi-usa.us, info@pi-japan.jp, www.pi-japan.jp, info@pi-japan.jp, www.pi-japan.jp, info@pi-china.cn, www.pi-china.cn, info@pifrance.fr, www.pifrance.fr, uk@pi.ws, www.physikinstrumente.co.uk, info@pionline.it, www.pionline.it, info@piceramic.de, www.piceramic.de,
www.publitas.com, www.publitas.nl
pi2009 main
