pi2009

A-9 Piezo • Nano • Positioning Working together to find solutions creates bonds that withstand the test of time. And finding solutions is utmost in the minds at PI, where cus- tomer service begins with the first exploratory talks and continues well after delivery of the products. Sales Engineers Worthy of the Name When our customers want to solve complex problems, they need detailed technical advice. Often the process involves visits at the site of your appli- cation and at PI's research, testing and manufacturing facility, where you and our Sales Engineers can take the time necessary to fully clarify all the issues involved. All of PI's Sales Engineers have degrees in physics or engineer- ing and up to 20 years experi- ence in optics, micro- and nanopositioning technology. If necessary, R&D or Applications Engineers can be brought in— even in the first phase of the discussions—to help define a course of action leading to a comprehensive solution. After-Sale Service The Sales Engineers are also available after the sale is made. They can advise you when the system is to be expanded, answer technical questions, and help with recalibration or refurbishment. International Support PI branch offices and distribu- tors assure global support from many countries in the world. This fact can also be used to advantage by compa- nies which themselves operate worldwide. Consulting and Customer Service From Customer to Partner Service, sales, and application support team at PI's HQ in Karlsruhe

© Physik Instrumente (PI) GmbH & Co. KG 2008. Subject to change without notice. Cat120E Inspirations2009 08/10.18 Piezo • Nano • Positioning A-10 To assure that the subassem- blies used satisfy PI's quality requirements, PI fabricates all components itself, develops the ultra-high-resolution sen- sors and controllers, and pro- grams both control algorithms and operating software. In Lederhose (Thuringia) at PI Ceramic, piezoelectric drives are developed, optimized and manufactured. With PIC, PI is the only positioning system manufacturer worldwide which develops its own piezoelectric actuators to meet market requirements. The resulting flexibility is an important rea- son for the technological lead- ership enjoyed by PI and its customers. Capacitive Sensors for Nanometrology Special sensors can fulfill the requirements of many applica- tions for dynamics, linearity and stability better than that provided by standard strain gauges. Non-contact capacitive sensors measure position without drift and provide linearity to 0,01% of the meas- urement range. The high resolution of up to 0.0005 % allows detection and compen- sation of the smallest position errors. PI uses capacitive sensors developed in-house, making it possible to adapt the sensor geometries to the space available. Placing the sensors as close as possible to the moving platform, PI provides direct metrology systems— systems in which motion is detected where it is used. PI capacitive sensors are also offered as stand-alone prod- ucts for nanometrology appli- cations. Control of Positioning Systems The characteristics of drives and sensors are made usable by the drive and control elec- tronics. PI has designed all electronics to match the mechanics optimally. Electro- nic amplifiers for piezoelectric actuators must provide low noise and drift. Fast rise times make possible sub-millisecond response times and optimized control algorithms minimize settling times. Digital con- trollers include advanced algo- rithms to improve the system performance: coordinate trans- formation matrices matched to the mechanical geometries allow for commanding com- plex systems in Cartesian coor- dinates; filters support servo- control by suppressing reso- nant vibrations; pre-shaping of control signals minimizes tra- jectory deviation during dyna- mic scans. All functions are easily accessible through fast and modern interfaces and comprehensive user software and software drivers. Flexibility Through Competent Partners High quality requires qualified partners. Over the years PI has thus qualified a number of highly specialized suppliers with whom we now work as partners—partners whose con- ception of quality is every bit as high as our own. Thinking in Systems All in One Hand—All from One Hand E-710 6-axis Digital Piezo Controller with 6-DOF piezo nanopositioning stage All PI nanopositioning systems come with extensive system performance documentation Drive, sensors, mechanics and control electronics with software—components of PI's positioning systems

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