Piezo Nano Positioning Features and Advantages of PILine ® Ultrasonic Piezomotors L52159 Compact Size: the direct- drive principle allows the de- sign of ultra-compact trans- lation stages. The M-662, for example, provides 20 mm travel in a 28 x 28x8mm package. L52159 Low Inertia, High Accelera- tion, Speed and Resolution: PILine ® drives achieve veloc- ities to 500 mm/s and accel- erations to 5 g. They are also very stiff, a prerequisite for their fast step-and-settle times on the order of a few milliseconds and provide resolution to 10 nm. The lack of a leadscrew means no lubricant flow or material relaxation to cause submi- cron creep. There is also no rotational inertia to limit acceleration and decelera- tion. L52159 Excellent Power-to-Weight Ratio: PILine ® drives are opti- mized for high performance in a minimum package. No comparable drive can offer the same combination of acceleration, speed and pre- cision. L52159 Safe: The minimum inertia of the moving platform togeth- er with the slip clutch effect of the drive provide better protection of precision fixtures / devices than lead- screw-driven stages. Despite the high speeds and acceler- ations, there is a much lower risk of pinching fingers or other injuries than with conventional drives. This means users may not need interlocks, light curtains or other measures to keep them safe. L52159 Self-Locking Feature: PILine ® drives create a braking force when not energized without the position shift common with conventional mechani- cal brakes. Other benefits of the self-locking are the elimi- nation of servo dither and steady-state heat dissipa- tion. L52159 Vacuum Compatibility: Vacu- um compatible versions of PILine ® drives are available. L52159 Negligible EMI: PILine ® dri- ves do not create magnetic fields nor are they influenced by them, a decisive advanta- ge in many applications. L52159 Custom Solutions / Flexibili- ty for OEMs: PILine ® drives are available in open-loop and closed-loop translation stages and as OEM compo- nents. PI develops and ma- nufactures all piezo ceramic components in-house. This gives us the flexibility to provide custom motors (size, force, environmental conditions) for OEM and research applications. L52159 Quality, Lifetime, Experien- ce: Based on PI's 4 decades of experience with piezo nanopositioning technolo- gy, PILine ® drives offer exceptional precision and reliability with an MTBF of >20,000 hours. Rotating components such as gears, shafts and moving cables that are prone to failure in conventional motion sys- tems, are not part of the PILine ® design. Settling behavior of a PILine ® M-663 linear stage, 100 µm step. A stable position to within 0.1 µm can be reached in only 10 ms Principle design of a PILine ® ultrasonic piezomotor-driven translation stage Custom high-force ultrasonic piezo motors can provide forces to 50 N © Physik Instrumente (PI) GmbH & Co. KG 2008. Subject to change without notice. Cat120E Inspirations2009 08/10.18 1-26
1-27 DC-Servo & Stepper Actuators Piezo Actuators & Components PiezoWalk ® Motors / Actuators PILine ® Ultrasonic Motors Nanopositioning / Piezoelectrics Linear Actuators & Motors Unpackaged Stack Actuators Guided / Preloaded Actuators Nanometrology Micropositioning Patches /Benders/Tubes /Shear.. Index Typical Applications for PILine ® Ultrasonic Motors Microscopy/Imaging Fast sample positioning XY-stages Long range scanning Biotechnology, Life Science Microdosing Dispensing Nano/microliter pumps Fast positioning Bio-handling Medical Design, Medical Technology Screening Fast positioning Cell penetration, microdosing Handling Non-magnetic actuators Nanotechnology, Nanofabrication, NanoAutomation ® Precision positioning of components (linear and rotation) Precision actuation Microgrippers Manipulators Semiconductor Technology Long-range placement and positioning Variety of PILine ® ultrasonic piezomotors, translation stages and motion controllers
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