pi2009

7 Piezo • Nano • Positioning Nanopositioning/Piezoelectrics Linear Actuators & Motors Nanometrology Micropositioning Index O Opticaldevicetesting ........................4-66 Opticalfilters ..............................2-82 Opticaltrapping .......................A-19,A-20 Optics ..........................A-16,A-19,A-24 P Patchclamp ..........................A-19,A-20 Photonics/integratedoptics .................A-24 Photonicspackaging ........................A-24 Pixeldithering/sub-steppingforimage resolutionenhancement .........A-18,A-27,2-56 Pneumatic&hydraulicvalves ................1-62 Precisionengineering/micromechanics ........1-62 Precisionmachining....................A-23,A-24 Precisionpositioning ..............A-22,A-23,A-27 Profilometry.................................1-4 Q Qualityassurancetesting ................A-8,A-23 S Satellitetestingequipment ....................4-6 Scanningmicroscopy .......................A-18 Screening ......................A-18,A-20,2-26 ff Semiconductortechnology ..................A-16 Semiconductortestequipment ..A-16,2-4 ff,3-2,4-20 ff Smartstructures ............................1-62 Staticanddynamic precisionpositioning ............A-22,A-23,A-27 Surfaceinspection ..........................A-22 Switches,optical ...........................A-24 T Testingequipment ................A-16,A-22,A-23 Toolcontrol ...............................A-25 Toys ......................................1-32 U Ultrasonicandsonarapplications..............1-62 V Valve .....................................A-23 Vibrationcontrol .......................1-62,1-96 W Waferinspection ...........................A-16 Wirebonders .........................A-16,1-94 X X-raydiffractionmeasurements ................4-4

8 Piezo • Nano • Positioning © Physik Instrumente (PI) GmbH & Co. KG 2008. Subject to change without notice. Cat120E Inspirations2009 08/10.18 KeywordIndex 2-phase steppermotorcontroller ..........................4-110 steppermotor ..........................1-40,4-20,4-130 3Dalignmentsystem ...........................2-70,4-64 6D alignmentsystem ............................4-12,4-66 Hexapod ...................................4-12,4-4 ff -microrobotwithautocollimator......................A-8 nanopositioningstage ..............................2-6 A Acceleration force,equation ..................................2-192 piezoactuators ..................................2-174 Accessories micropositioning ..................................4-90 piezoactuators ................................1-102 ff piezoelectronics ...............................2-168 ff Accuracy absolute,definition ...............................4-128 nanometer,measuring ............................3-2 ff Active guiding,runoutsuppression ...................2-9,2-211 optics,mirrors ..................................2-82 ff toolcontrol .......................................2-2 vibrationcontrol ............................A-26,2-194 Active/adaptiveoptics.................A-20,A-26-28,2-82 ActiveDrive™,definition ............................4-130 Activeoptics/steeringmirrors,selectionguide ..........2-82 Actuator bender ................................1-84,1-94,2-209 bimorph-andmultimorph................1-84,1-94,2-209 capacitance .....................................2-196 electrostrictive(PMN) .............................2-214 HVPZT ......................................1-62,1-64 linear ...........................................1-2 ff monolithic .......................................1-82 PICMA ® ...............................1-62,1-65ff,1-82 piezo ......................................1-62,2-172 piezo,designs .............................2-178,2-207 stiffnesscalculation ..............................2-184 Adapter actuatortoppieces .............................1-102 ff bracketsandplates ................................4-90 cardsandcables .........................1-104,2-168 ff Adaptivemechanics ............................2-9,2-211 Aeronautics .......................................A-27 AFM(AtomicForceMicroscope) .................A-16,2-66 After-salesservice ...................................A-9 Agingofpiezoactuators ............................2-186 Airconnection,forcooling ..........................2-178 Agencies .......................................A-2,A-9 Alignment fiber ............................................A-24 optics ..................................A-16,A-24,4-6 maskandwafer .............................A-16,A-17 MEMSpositioning ................................A-24 Amplifier outputcurrent,equations .........................2-196 noise...........................................2-183 Analog&digitalcontrollers forpiezos .................................2-10,2-97 ff forservomotors ...............................4-109 ff AnalogI/O ........................................2-104 Analoginterface ...................................2-105 Angle andaxisdefinitions ..............................4-128 bracketsformicropositioningstages ...............4-89 ff Angularstability ....................................2-83 Applications piezoactuators ..............................1-5,2-174 seeApplicationsIndex ..............................6 ff Astronomicaltelescopes .............................2-85 Astronomy ........................A-7,A-28,2-82,2-100 ff Autocollimator,fortesting .......................A-8,2-87 Autofocus,PositioningSystem ........A-19,A-21,2-5,2-25 ff Automation NanoAutomation ® ......................A-4,2-118,2-162 piezoelectricvalve................................2-177 platform ........................................4-124 Automotivetechnology .............................2-177 Axesandangles,definitions .........................4-128 Axiscross-talksuppression ......................2-9,2-211 B Ball-tipoption ...................................1-102 ff Ballbearings ......................................4-131 Ballscrew .........................................4-131 Bariumtitanate ....................................2-181 Beam pathcorrection ..............................A-17,2-82 stabilization ............................A-17,A-28,2-86 steering .........................................2-86 Bearings ball ............................................4-131 crossedroller....................................4-131 Benderactuators .........................1-84,1-94,2-209 Bidirectionalrepeatability ......................4-67,4-128 Bimorph-andmultimorphactuators .........1-84,1-94,2-209 Biology .................................A-19,2-5,2-25 ff Biotechnology .......................A-19,2-5,2-66,4-124 Blockedforce,definition ............................2-175 BNCcable ......................................2-168 ff Bodeplot ....................................A-12,2-106

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pi2009 main