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© Physik Instrumente (PI) GmbH & Co. KG 2008. Subject to change without notice. All data are superseded by any new release. The newest release for data sheets is available for download at www
.pi.ws. Cat120E Inspirations2009 08/10.18
Piezo Nano Positioning
E-755 digital single-axis nano -
positioning controllers are
designed to drive the patented
NEXLINE
®
nanopositioning
linear drives. Combining ad -
vanced control technology
and sensor signal processing
with special drive algorithms,
the E-755 can provide preci-
sion motion control over hun-
dreds of millimeters with pico -
meter-range resolution. Coor -
di nated action of shearing and
clamping piezo elements is
what allows NEXLINE
®
to
break through the barriers of
conventional nanopositioning
actuators.
The E-755 offers two different
control modes for the NEX-
LINE
®
walking drives: a high-
resolution, high dynamics di -
rect piezo mode, with basical-
ly unlimited resolution (ana-
log mode), and a long-range
stepping mode with theoreti-
cally unlimited travel range.
High-Resolution Servo-
Control
E-755 controllers are based on
powerful 32-bit DSPs and
come in open- and closed-
loop versions. Both versions
feature four high-resolution
(24-bit) linear amplifiers with
the output range of ±250 V
required to control a single-
axis NEXLINE
®
drive. For the
closed-loop models, high-reso -
lu tion incremental position
sensors are supported by spe-
cial excitation and read-out
electronics.
The sensors supported may
provide better than nanome-
ter resolution. A power-down
routine in the E-755 firmware
saves the current position,
allowing a closed-loop system
to be ready for operation with-
out referencing next time it is
powered up.
NEXLINE
®
Working Principle
for Application Flexibility
NEXLINE
®
PiezoWalk
®
drives
are ideal wherever high loads
must be positioned very pre-
cisely over long distances and
then perhaps subjected to
small-amplitude dynamic ad -
just ment, as for active vibra-
tion control. By varying the
characteristics of the longitu-
dinal and shear piezo ele-
ments, the step size, dynamic
operating range (analog trav-
el), clamping force, speed and
stiffness can all be optimized
for a particular application.
NEXLINE
®
PiezoWalk
®
piezoce-
ramic clamping and shearing
elements act directly on a
moving runner that is coupled
to the moved part in the
application. While the runner
can bemoved large distances
in step mode, high-dynamics
positioning over distances of
less than one step is possible
with resolutions far below one
nanometer in analog mode.
The patented PiezoWalk
®
thus
overcomes the limitations of
conventional nanopositioning
actuators and combines long
travel ranges with high reso -
lution and stiffness.
Extreme Actuator Lifetime
To eliminate long-term offset
voltages, which limit the life-
time of conventional piezo
drives, the E-755 controller
uses a special procedure to
bring the actuator to a full-
holding-force, zero-voltage
condition, no matter where it
may be along its travel range.
Due to the resulting long life-
time, NEXLINE
®
nanoposition-
E-755 Digital NEXLINE
®
Controller
Controller for Picometer-Precision PiezoWalk
®
Linear Actuators / Positioners
Steps of 5 nm performed by a system consisting of an N-214 NEXLINE
®
nanoposi-
tioner and an E-755.1A1 controller, measured by a high-resolution interferometer.
Note the excellent system response to consecutive 5 nm step commands. In this
case the closed-loop resolution is limited by the linear encoder in the N-214 (5 nm /
increment); the E-755 can work with linear encoders with sub-nanometer resolution
L52159 Special Control Algorithms for NEXLINE
®
Nanopositioning
Linear-Motor Actuators
L52159 32-Bit Digital Filters
L52159 24-Bit DAC Resolution
L52159 Fully Programmable Low-Pass and Notch Filters
L52159 Non-Volatile User Settings and Last-Position Data
L52159 Daisy-Chain Networking for up to 16 Axes
L52159 PI GCS (General Command Set) Compatible
Application Examples
L52159 Semiconductor technology
L52159 Quality assurance testing
in semiconductor industry
L52159 Astronomical telescopes
L52159 Truss structures
L52159 Active vibration control
L52159 Alignment in high mag -
netic fields, as in particle
physics, atomic fusion and
superconductivity research
Ordering Information
E-755.1A1
Digital Controller for NEXLINE
®
Nanopositioning Linear Drives,
Incremental Sensors
E-755.101
Digital Controller for NEXLINE
®
Nanopositioning Linear Drives
E-755 digital NEXLINE
®
controller with
N-214 nanopositioner, 20 mm travel range.
1-19
Piezo Nano Positioning
DC-Servo & Stepper Actuators
Piezo Actuators & Components
PiezoWalk
®
Motors / Actuators
PILine
®
Ultrasonic Motors
Nanopositioning / Piezoelectrics
Linear Actuators & Motors
Unpackaged Stack Actuators
Guided / Preloaded Actuators
Nanometrology
Micropositioning
Patches /Benders/Tubes /Shear..
Index
Technical Data
Model E-755.1A1 E-755.101
Funktion Digital controller for NEXLINE
®
Digital controller for NEXLINE
®
nanopositioning linear drives nanopositioning linear drives
with incremental encoder
Axes 1 1
Processor DSP 32-bit floating point, 50 MHz DSP 32-bit floating point, 50 MHz
Sensor
Sensor channels 1
Servo update time 0.2 ms
Sensor sampling time 0.1 ms
Dynamic cycle time 0.2 ms 0.1 ms
Servo characteristics P-I, notch filter
Sensor type Incremental sensor
Amplifier
Amplifier channels 4 4
Output voltage -250 to +250 V -250 to +250 V
Peak output power per channel 5.5 W 5.5 W
Average output power per channel 3 W, limited by temperature sensor 3 W, limited by temperature sensor
Peak current 44 mA 44 mA
Average current per channel 25 mA, limited by temperature sensor 25 mA, limited by temperature sensor
Current limitation Short-circuit-proof Short-circuit-proof
Resolution DAC 24 bit 24 bit
Interfaces and operation
Communication interfaces RS-232 RS-232
Piezo connector Sub-D Special Sub-D Special
Sensor connector 15-pin sub-D connector
Controller network Daisy-chain, up to 16 units Daisy-chain, up to 16 units
Command set GCS GCS
User software PIMikroMove, NanoCapture , PITerminal PIMikroMove, NanoCapture , PITerminal
Software drivers LabVIEW drivers, DLLs LabVIEW drivers, DLLs
Supported functionality NEXLINE
®
Control algorithms (closed-loop), NEXLINE
®
Control algorithms (open-loop),
data recorder, position storage data recorder
Display Status LEDs Status LEDs
Linearization 4th order polynomial 4th order polynomial
Miscellaneous
Operating temperature range 5 to 50 °C 5 to 50 °C
Overtemp protection Deactivation at 70 °C Deactivation at 70 °C
Dimensions 264 x 260 x 47 mm 264 x 260 x 47 mm
Mass 2.3 kg 2.3 kg
Operating voltage 24 V (power supply included) 24 V (power supply included)
Power consumption 48 W, 2 A max. 48 W, 2 A max.
Six-axis nonmagnetic
Hexapod with N-215-based
NEXLINE
®
high-load
actuators for use in high
magnetic fields.
The system is driven
by six E-755 controllers
and additional
hardware/firmware to
automatically perform the
necessary parallel-
kinematics coordinate
transformation
Steps of 50 picometers with a NEXLINE
®
drive in open-loop mode
measured with external, ultra-high-resolution, capacitive sensor
ing actuators are ideal for installa-
tion in inaccessible locations
deep inside complex equipment,
where nanometer-pre cise align-
ment and vibration cancellation
are required.
Linearization
E-755-controlled nanopositioning
systems provide outstanding lin-
earity, achieved by digital polyno-
mial linearization. The lineariza-
tion can improve linearity to
0.001 % over the full travel range.
The products described in this
datasheet are in part protected by
the following patents:
German Patent No. 10148267
US Patent No. 6,800,984
www.pionline.it, www.pifrance.fr, www.pi-china.cn, www.goa-tech.co.il, www.alt.nl, www.bfioptilas.es, www.pi.ws, www.piceramic.de, www.pi-usa.us, www.pi-usa.us, www.pi-japan.jp, www.pi-japan.jp, www.physikinstrumente.co.uk, www.dyneos.ch, www.parameter.se, dms@deepms.com, www.deepms.com, www.warsash.com.au, www.parameter.se, www.eliovac.com.ar, www.rsdobrasil.com.br, www.woojoohitech.com, www.cairnhill.com, www.tetmakina.com, Seewww.piceramic.com, Seep.1-94ff.andwww.piceramic.com, Seewww.piceramic.com, Seealsowww.piceramic.com, andoscillatingmotione.g.in, info@pi-usa.us, www.pi-usa.us, info@pi-usa.us, www.pi-usa.us, info@pi-japan.jp, www.pi-japan.jp, info@pi-japan.jp, www.pi-japan.jp, info@pi-china.cn, www.pi-china.cn, info@pifrance.fr, www.pifrance.fr, uk@pi.ws, www.physikinstrumente.co.uk, info@pionline.it, www.pionline.it, info@piceramic.de, www.piceramic.de,
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