pi2009
1-16
© Physik Instrumente (PI) GmbH & Co. KG 2008. Subject to change without notice. All data are superseded by any new release. The newest release for data sheets is available for download at www
.pi.ws. Cat120E Inspirations2009 08/10.18
Piezo Nano Positioning
N-661 Miniature Linear Stage with NEXACT
®
Drive
PiezoWalk
®
Drive Provides Nanometer Precision and Smooth Motion
L52159 Travel Range 20 mm
L52159 Self Locking at Rest, no Heat Generation, no Servo Dither
L52159 Compact Design: 70 x 50 x 20 mm
L52159 Zero-Wear Piezo Stepping Drive, Ideal for Micro- and Nano-
Manipulation
L52159 Integrated Linear Encoder Option for Highest Accuracy with
20 nm Resolution
L52159 Two Operating Modes: Continuous Stepping Mode and
Continuously Variable, High-Dynamics Analog Mode for
30 pm Resolution**
L52159 Up to 10 N Force Generation
Application Examples
L52159 Life science
L52159 Photonics
L52159 Laser tuning
L52159 Motion in strong
magnetic fields
Ordering Information
N-661
Miniature NEXACT
®
Translation
Stage, 20 mm, Linear Encoder,
20 nm Resolution
Available on request
Ask about custom designs
Technical Data (Preliminary)
Model N-661
Active axes X
Motion and positioning
Travel range 20 mm
Step size in stepping mode (open-loop) To 5 µm
Integrated sensor Linear encoder
Sensor resolution 20 nm*
Travel range in analog mode 7 µm
Open-loop resolution 0.03 nm**
Closed-loop resolution 20 nm*
Bidirectional repeatability 40 nm
Pitch 50 µrad
Yaw 50 µrad
Step frequency 1.5 kHz
Max. velocity 10 mm/s*
Mechanical properties
Stiffness in motion direction 2.4 N/µm
Max. load capacity 20 N
Max. push / pull force (active) 10 N
Max. holding force (passive) 15 N
Lateral Force 50 N
Drive properties
Drive type NEXACT
®
linear drive
Operating voltage -10 to +45 V
Miscellaneous
Operating temperature range 0 to 50 °C
Material Aluminum
Mass 150 g
Cable length 1.5 m
Connector 15-pin sub-HDD connector, one channel
Recommended controller/driver E-861.1A1 Controller for NEXACT
®
Linear Drives and Positioners (see p. 1-20)
*With E-861. Depending on drive electronics.
**Depending on the drive electronics.
The N-661 miniature linear stage integrates a PiezoWalk
®
NEXACT
®
linear motor
combined with a high-resolution linear encoder. It provides 20 mm travel and
resolution down to the nanometer range.
Dimensions
of N-661
The compact N-661 nanoposi-
tioning stage is based on the
NEXACT
®
PiezoWalk
®
drive.
This dual-mode, high-perfor-
mance piezo stepping linear
motor can provide sub-nano-
meter resolution and high
force, along with very rapid
response. When run in its
analog mode, fast oscillations
with amplitudes up to 7 mi -
crons and resolutions down to
30 pm can be achieved. This
mode is of great value in high-
throughput applications as
well as in dynamic laser tun -
ing, cell penetration applica-
tions, or even for active vibra-
tion damping. The stage is
equipped with a precision gui-
ding system and an optical
linear encoder to enable highly
repeatable positioning.
The products described in this
document are in part protected
by the following patents:
German Patent No. P4408618.0
1-17
Piezo Nano Positioning
DC-Servo & Stepper Actuators
Piezo Actuators & Components
PiezoWalk
®
Motors / Actuators
PILine
®
Ultrasonic Motors
Nanopositioning / Piezoelectrics
Linear Actuators & Motors
Unpackaged Stack Actuators
Guided / Preloaded Actuators
Nanometrology
Micropositioning
Patches /Benders/Tubes /Shear..
Index
N-515K Non-Magnetic Piezo Hexapod
6-Axis Precision Positioning System with NEXLINE
®
Linear Drives
L52159 Travel Ranges 10 mm Linear, 6° Rotation
L52159 Large Clear Aperture Ø 202 mm
L52159 Non-Magnetic
L52159 Nanometer Resolution
L52159 Low-Profile: 140 mm Height Only
L52159 Parallel Kinematics for Enhanced Dynamics and
Better Multi-Axis Accuracy
L52159 Up to 500 N Force Generation
L52159 Self Locking at Rest, No Heat Generation
N-510 High-Force NEXLINE
®
Z/Tip/Tilt Platform
Nanometer Precision for Semiconductor Industry, Wafer Alignment
L52159 Self Locking at Rest, No Heat Generation
L52159 Vacuum Compatible and Non-Magnetic Designs Feasible
L52159 Parallel Kinematics for Enhanced Dynamics and
Better Multi-Axis Accuracy
L52159 NEXLINE
®
Piezo Walking Drive Free from Wear and Tear
L52159 Load Capacity 200 N
L52159 High Precision with Integrated 5 nm Incremental Sensors +
Picometer Resolution Dithering Mode
N-510K High-Stiffness NEXLINE
®
Z Stage
High-Precision Positioning, with Capacitive Sensors
L52159 Self Locking at Rest, No Heat Generation
L52159 Hybrid Drive: PiezoWalk
®
plus PICMA
®
L52159 Travel Range: 400 µm Coarse + 40 µm Fine
L52159 2 nm Closed-Loop Resolution
L52159 Direct Metrology:
One Single Control Loop with Capacitive Sensors
L52159 High Push and Holding Force to 25 N
L52159 Piezo Walking Drive w/o Wear and Tear & Outstanding
Lifetime due to PICMA
®
Piezo Actuators
6-axis parallel kinematics (Hexapod) with integrated
N-215 NEXLINE
®
high-load actuators, suitable for
applications in strong magnetic fields
Z, tip, tilt nanopositioning platform with
3 integrated drives (tripod design)
The N-510KHFS hybrid-drive nanopositioner
offers maximum accuracy for semiconductor
inspection applications
Model Travel Range Load capacity Dimensions
N-515KNPH X, Y, Z: 10 mm 50 kg Outer Ø baseplate, 380 mm
NEXLINE
®
?
X
, ?
Y
, ?
Z
: 6° Ø moved platform (top) 300 mm
Piezo Hexapod 140 mm height
Model Travel Load capacity Linear velocity Dimensions
N-510 NEXLINE
®
1,3 mm 200 N 0.2 mm/s Ø 300 mm (12´´)
Z, tip, tilt platform vertical range clear aperture
10 mrad Ø 250 mm
tilt angle
Model Vertical Velocity Bidirectional Load Dimensions
travel repeatability capacity
N-510KHFS 400 µm coarse 1 mm/sec 50 nm 25 N Ø 300 mm
Hybrid- 40 µm fine (full travel) 68.5 mm
Focus System height© Physik Instrumente (PI) GmbH & Co. KG 2008. Subject to change without notice. All data are superseded by any new release. The newest release for data sheets is available for download at www
.pi.ws. Cat120E Inspirations2009 08/10.18
www.pionline.it, www.pifrance.fr, www.pi-china.cn, www.goa-tech.co.il, www.alt.nl, www.bfioptilas.es, www.pi.ws, www.piceramic.de, www.pi-usa.us, www.pi-usa.us, www.pi-japan.jp, www.pi-japan.jp, www.physikinstrumente.co.uk, www.dyneos.ch, www.parameter.se, dms@deepms.com, www.deepms.com, www.warsash.com.au, www.parameter.se, www.eliovac.com.ar, www.rsdobrasil.com.br, www.woojoohitech.com, www.cairnhill.com, www.tetmakina.com, Seewww.piceramic.com, Seep.1-94ff.andwww.piceramic.com, Seewww.piceramic.com, Seealsowww.piceramic.com, andoscillatingmotione.g.in, info@pi-usa.us, www.pi-usa.us, info@pi-usa.us, www.pi-usa.us, info@pi-japan.jp, www.pi-japan.jp, info@pi-japan.jp, www.pi-japan.jp, info@pi-china.cn, www.pi-china.cn, info@pifrance.fr, www.pifrance.fr, uk@pi.ws, www.physikinstrumente.co.uk, info@pionline.it, www.pionline.it, info@piceramic.de, www.piceramic.de,
www.publitas.com, www.publitas.nl
pi2009 main
