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© Physik Instrumente (PI) GmbH & Co. KG 2008. Subject to change without notice. All data are superseded by any new release. The newest release for data sheets is available for download at www
.pi.ws. Cat120E Inspirations2009 08/10.18
Piezo Nano Positioning
jitter as it occurs with other
closed-loop motors. Since
motion is not based on dynam-
ic friction as with piezo inertial
drives (stick-slip-motors) but
solely caused by the nano -
meter precise motion of
clamped piezo actuators, there
is no wear to limit the lifetime.
When operated in closed-loop,
excellent velocity control is
achieved.
High-Resolution PiezoWalk
®
Linear Actuator with Optional Position Sensor
N-380, N-381 NEXACT
®
Linear Actuator, Manipulator, Piezo Stepper
L52159 Travel Range 30 mm
L52159 Novel, Zero-Wear Piezo Stepping Drive, Ideal for Micro- and
Nano-Manipulation
L52159 Integrated Linear Encoder Option for Highest Accuracy with
20 nm Resolution
L52159 Very High Acceleration, e.g. for Cell Penetration
L52159 Two Operating Modes: Continuous Stepping Mode and
Continuously Variable, High-Dynamics Analog Mode for
30 pm Resolution**
L52159 Up to 10 N Force Generation
L52159 Self Locking at Rest, no Heat Generation
L52159 Smooth Motion, no Closed-Loop Jitter
L52159 Vacuum-Compatible and Non-Magnetic Versions
The compact N-380/N-381 line -
ar actuators are ideal drives
and micro manipulators e.g. for
biotechnology and nanotech-
nology applications. Rapid
accelerations, velocities of
10 mm/s and forces up to 10 N
enable high-dynamics and
throughput for automation
tasks. The PiezoWalk
®
drive
principle allows long travel
ranges and fast oscillations of
7 µm amplitude with frequen-
cies up to several 100 Hz. This
analog mode can be used to
provide rapid acceleration, e.g.
in cell penetration applications,
or smooth motion for dynamic
laser tuning or even for active
damping of oscillations. Two
models are available, both very
compact, measuring only
122 mm in length: The N-381
model is equipped with a high-
resolution position sensor,
allowing sub-micrometer re -
peatability in closed-loop oper-
ation. The N-380 open-loop ver-
sion is intended for high preci-
sion applications where the
absolute position is not impor-
tant or is controlled by an
external loop (video, laser,
quadcell, etc.).
Piezo Stepping Drive the
Multi-Functional Piezo Linear
Motor
A great advantage characteris-
tic of the NEXACT
®
piezo step-
ping drive is its dual-mode
operating principle combining
the best features of other piezo
motor designs, such as high
resolution, high force and high
speed into one compact unit.
At the target position the drive
requires no current and gener-
ates no heat while providing
long-term, nanometer stability.
This autolocking feature also
completely eliminates servo-
N-381 piezo stepper linear actuator for sample
positioning and manipulation provides long
travel, high speed and very high resolution
Ordering Information
N-380 Open-Loop
NEXACT
®
Linear Actuator, 30 mm
N-381 Closed-Loop
NEXACT
®
Linear Actuator, 30 mm,
20 nm Encoder Resolution
Available on request
Ask about custom designs!
Application Examples
L52159 Drive unit for scanning
stage
L52159 Cell manipulation,
biohandling
L52159 Micromanipulation
L52159 Life science
L52159 Photonics
L52159 Laser tuning
L52159 Motion in strong magnetic
fields N-380/N-381 dimensions in mm
1-15
Piezo Nano Positioning
DC-Servo & Stepper Actuators
Piezo Actuators & Components
PiezoWalk
®
Motors / Actuators
PILine
®
Ultrasonic Motors
Nanopositioning / Piezoelectrics
Linear Actuators & Motors
Unpackaged Stack Actuators
Guided / Preloaded Actuators
Nanometrology
Micropositioning
Patches /Benders/Tubes /Shear..
Index
Technical Data (Preliminary)
Model N-380 Open-Loop N-381 Closed-Loop
Active axes X X
Motion and positioning
Travel range 30 mm 30 mm
Step size (in step mode) To 5 µm To 5 µm
Integrated sensor Incremental linear encoder
Sensor resolution 20 nm*
Travel range in analog mode 7 µm 7 µm
Open-loop resolution 0.03 nm** 0.03 nm**
Closed-loop resolution 20 nm*
Step frequency 1.5 kHz 1.5 kHz
Max. velocity 10 mm/s* 10 mm/s*
Mechanical properties
Stiffness in motion direction 2.4 N/µm 2.4 N/µm
Max. push / pull force (active) 10 N 10 N
Max. holding force (passive) 15 N 15 N
Lateral force 10 N 10 N
Drive properties
Drive type NEXACT
®
linear drive NEXACT
®
linear drive
Operating voltage -10 V to +45 V -10 V to +45 V
Miscellaneous
Operating temperature range 0 to 50 °C 0 to 50 °C
Material Stainless steel Stainless steel
Mass 250 g 255 g
Cable length 1.5 m 1.5 m
Connector 15-pin sub-HDD connector, 15-pin sub-HDD connector,
one channel one channel
Recommended controller/driver E-860 series (see p. 1-20) E-861.1A1 (see p. 1-20)
*With E-861. Depending on drive electronics.
**Depending on the drive electronics.
Working Principle for
Application Flexibility
NEXACT
®
PiezoWalk
®
technolo-
gy overcomes the limitations
of conventional nanoposition-
ing drives and combines virtu-
ally unlimited travel ranges
with high stiffness in a very
small package. Furthermore,
NEXACT
®
actuators provide
piezo-class resolution (far
below one nanometer) and mil-
lisecond responsiveness. The
special drive design reduces
the operating voltage to 45 V
and below.
In operation, piezoceramic
bending elements act on the
runner, which is connected to
the moving part of the applica-
tion. The length of the runner
determines the travel range
and can be chosen as required.
Force capacity, resolution and
velocity are determined by the
piezo geometry and drive elec-
tronics and are scalable. To
move the runner over longer
distances the stepping mode is
used, whereas for distances
smaller than one step, the lin-
ear (analog) mode enables
high-dynamics positioning
with resolutions far below one
nanometer.
Controllers and Drivers
Optimized for the Application
NEXACT
®
actuators require
special drive electronics to
control the complex stepping
sequences. The E-860 series
NEXACT
®
controllers are avail-
able in different open-and
closed-loop versions. For
example, the E-861 includes a
complete NEXACT
®
servo-con-
troller with low-noise drivers
and a powerful DSP. It also
comes with ample software for
easy integration and highly
effective computer control. For
applications which do not
require the highest resolution
lower-priced drive electronics,
ranging all the way to OEM
boards, can be ordered.
The products described in this
document are in part protected
by the following patents:
German Patent No. P4408618.0
www.pionline.it, www.pifrance.fr, www.pi-china.cn, www.goa-tech.co.il, www.alt.nl, www.bfioptilas.es, www.pi.ws, www.piceramic.de, www.pi-usa.us, www.pi-usa.us, www.pi-japan.jp, www.pi-japan.jp, www.physikinstrumente.co.uk, www.dyneos.ch, www.parameter.se, dms@deepms.com, www.deepms.com, www.warsash.com.au, www.parameter.se, www.eliovac.com.ar, www.rsdobrasil.com.br, www.woojoohitech.com, www.cairnhill.com, www.tetmakina.com, Seewww.piceramic.com, Seep.1-94ff.andwww.piceramic.com, Seewww.piceramic.com, Seealsowww.piceramic.com, andoscillatingmotione.g.in, info@pi-usa.us, www.pi-usa.us, info@pi-usa.us, www.pi-usa.us, info@pi-japan.jp, www.pi-japan.jp, info@pi-japan.jp, www.pi-japan.jp, info@pi-china.cn, www.pi-china.cn, info@pifrance.fr, www.pifrance.fr, uk@pi.ws, www.physikinstrumente.co.uk, info@pionline.it, www.pionline.it, info@piceramic.de, www.piceramic.de,
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