pi2009
4-79
Piezo Nano Positioning
Single-Channel
Hybrid
Multi-Channel
Translation (X)
Vertical (Y)
Multi-Axis
Nanopositioning / Piezoelectrics
Linear Actuators & Motors
Hexapod 6-Axis Systems /
Parallel Kinematics
Linear Stages
Rotary & Tilt Stages
Accessories
Nanometrology
Micropositioning
Servo & Stepper
Motor Controllers
Micropositioning
Fundamentals
Index
Technical Data
Model M-037.00 M-037.DG M-037.PD M-037.2S
Active axes Rotation Rotation Rotation Rotation
Motion and positioning
Rotation range >360 >360 >360 >360 °
Integrated sensor Rotary encoder Rotary encoder
Sensor resolution 2000 4000 cts./rev.
Design resolution 0.59 (34 x 10
-6
) 8.75 (0.0005) 5.45* (0.00031) µrad (°)
Min. incremental motion 3.5 27 21 µrad
Backlash 200 200 200 µrad
Unidirectional repeatability 30 30 30 µrad
Wobble <150 <150 <150 <150 µrad
Max. velocity 6 45 10 °/s
Mechanical properties
Worm gear ratio 180:1 180:1 180:1 180:1
Gear ratio (28/12)
4
? 29.6:1
Motor resolution 6400* steps/rev.
Load capacity/axial force,
self-locking ±300 ±300 ±300 ±300 N
Max. torque (H9258
X
, H9258
Y
)±3±3 ±3 ±3 m
Max. torque clockwise (H9258
Z
)1 1 1 1 N
Max. torque counter clockwise (H9258
Z
) 0.5 0.5 0.5 0.5 Nm
Drive properties
Motor type DC motor, gearhead ActiveDrive DC Motor 2-phase stepper motor*
Operating voltage 0 to ±12 24 (PWM) 24 V
Electrical power 3 30 W
Reference switch Hall-effect Hall-effect Hall-effect
Miscellaneous
Operating temperature range -20 to +65 -20 to +65 -20 to +65 -20 to +65 °C
Material Aluminum Aluminum Aluminum Aluminum
Mass 0.3 0.65 0.62 0.64 kg
Recommended controller/driver C-863 (single-axis) C-863 (single-axis, p. 4-114) C-663 (single-axis,
C-843 PCI-Karte C-843 PCI-Karte (p. 4-120) p. 4-112)
(for up to 4 axes) (for up to 4 axes)
incl. motor cable, 3 m, sub-D connector 15-pin
*2-phase stepper motor, 24 V chopper voltage, max. 0.8 A/phase, 400 full steps/rev., motor resolution with C-663 stepper motor controller
M-037.00 Rotation stage
M-037.00 dimensions (in mm) M-037.DG dimensions (in mm)
4-80
©
Physik
Instrumente
(PI)
GmbH
&
Co.
KG
2008.
Subject
to
change
without
notice.
All
data
are
superseded
by
any
new
release.
The
newest
release
for
data
sheets
is
available
for
download
at
www
.pi.ws.
Cat120E
Inspirations2009
08/10.18
Piezo Nano Positioning
M-038 Precision Rotation Stage
Unlimited Travel Range, Vacuum-Compatible Versions
M-038 rotation stages are
equipped with an ultra-precise
worm gear drive allowing con-
tinuous rotation in either direc-
tion. Double-row ball bearings
allow high load capacity, zero
backlash and extremely low
wobble. The new and im-
proved M-038.xx1 versions
now feature a larger central
aperture and a higher-perform-
ance worm wheel drive.
The worm gear ratio of 176:1
allows an extraordinary high
position resolution of the
turntable.
DC-Motor and Stepper Motor
Drives
A variety of servo motor and
stepper motors are available,
besides the manual version.
Model M-038.DG1 equipped
with a closed-loop DC motor
with shaft-mounted position
encoder and precision gear-
head providing minimum in-
cremental motion of 3.5 µrad at
a design resolution of 0.6 µrad.
Model M-038.2S1 models fea-
ture a cost-effective direct-
drive, 2-phase stepper motor,
providing very smooth oper-
ation and a resolution of
5.45 µrad at a minimum incre-
mentalmotionof21µm.
ActiveDrive
Model M-038.PD is equipped
with the highly efficient Active
Drive direct drive and reach-
es velocities up to 45°/s. The
ActiveDrive design, devel-
oped by PI, features a high-effi-
ciency PWM (pulse width mod-
ulation) servo-amplifier mount-
ed side-by-side with the DC
motor and offers several
advantages:
L52159 Increased efficiency, by
eliminating power losses
between the amplifier and
motor
L52159 Reduced cost of ownership
and improved reliability,
because no external driver
is required
L52159 Elimination of PWM amplifi-
er noise radiation, by
mounting the amplifier and
motor together in a single,
electrically shielded case
Coarse position can be read
from an adjustable scale ring
on the outer edge of the
turntable graduated in 2 degree
increments. Each M-038 stage
is individually broken-in before
delivery to achieve the excep-
tional mechanical precision.
Notes
See Accessories for adapters,
bracket, etc. see page 4-90 ff.
M-038.PD1 Rotation Stage
L52159 Ultra-High Resolution
L52159 Max. Velocity 90°/s
L52159 Continuous Rotation Range
L52159 Preloaded Worm Drive for Zero Backlash
L52159 ActiveDrive Manual, DC-Servo and Stepper-Motor Drives
L52159 Clear Aperture Ø 40.2 mm
L52159 Vacuum-Compatible Versions Available to 10
-6
hPa
M-038.001, dimensions in mm
Ordering Information
M-038.001
Rotation Stage, Ø 100 mm, 360°,
Manual Drive
M-038.DG1
Rotation Stage, Ø 100 mm, 360°,
Closed-Loop DC Motor Gearhead
M-038.VG1
Rotation Stage, Ø 100 mm, 360°,
Closed-Loop DC Motor Gearhead,
Vacuum Compatible to 10
-6
hPa
M-038.PD1
Rotation Stage, Ø 100 mm, 360°,
ActiveDrive DC Motor
(Includes 24 V Power Supply)
M-038.VP1
Rotation Stage, Ø 100 mm, 360°,
ActiveDrive DC Motor (Includes
24 V Power Supply), Vacuum
Compatible to 10
-6
hPa
M-038.2S1
Rotation Stage, Ø 100 mm, 360°,
2-Phase Stepper Motor
Ask about custom designs!
Custom M-038 stages at the coordinate
measuring machine
www.pionline.it, www.pifrance.fr, www.pi-china.cn, www.goa-tech.co.il, www.alt.nl, www.bfioptilas.es, www.pi.ws, www.piceramic.de, www.pi-usa.us, www.pi-usa.us, www.pi-japan.jp, www.pi-japan.jp, www.physikinstrumente.co.uk, www.dyneos.ch, www.parameter.se, dms@deepms.com, www.deepms.com, www.warsash.com.au, www.parameter.se, www.eliovac.com.ar, www.rsdobrasil.com.br, www.woojoohitech.com, www.cairnhill.com, www.tetmakina.com, Seewww.piceramic.com, Seep.1-94ff.andwww.piceramic.com, Seewww.piceramic.com, Seealsowww.piceramic.com, andoscillatingmotione.g.in, info@pi-usa.us, www.pi-usa.us, info@pi-usa.us, www.pi-usa.us, info@pi-japan.jp, www.pi-japan.jp, info@pi-japan.jp, www.pi-japan.jp, info@pi-china.cn, www.pi-china.cn, info@pifrance.fr, www.pifrance.fr, uk@pi.ws, www.physikinstrumente.co.uk, info@pionline.it, www.pionline.it, info@piceramic.de, www.piceramic.de,
www.publitas.com, www.publitas.nl
pi2009 main
