pi2009
© Physik Instrumente (PI) GmbH & Co. KG 2008. Subject to change without notice. All data are superseded by any new release. The newest release for data sheets is available for download at www
.pi.ws. Cat120E Inspirations2009 08/10.18
Piezo Nano Positioning
N-310 NEXACT
®
PiezoWalk
®
lin-
ear drives feature travel ranges
of 20 mm and push/pull force
capacities to 10 N in a compact
package of only 25 x 25 x 12 mm.
With their high resolution,
NEXACT
®
drives, are ideal for
high-precision positioning over
long travel ranges.
The N-310 can be operated in
open-loop and closed-loop mo -
de (with the addition of an ex -
ter nal position sensor). A varie -
ty of NEXACT
®
controllers facil-
itates the integration into micro-
or nanopositioning appli cations.
Advantages of PiezoWalk
®
Piezo Stepping Drives
NEXLINE
®
and NEXACT
®
drives
offer several advantages over
traditional drive technologies:
L52159 Resolution in the picometer
range
L52159 Compact dimensions
L52159 High drive forces from ten
newtons (NEXACT
®
) up to
several hundred newtons
(NEXLINE
®
)
L52159 High-dynamics performance
with sub-microsecond res -
ponse
L52159 Self-locking when powered
down; no holding current
L52159 Zero backlash, no wear or
maintenance, no mechani-
cal components like gears
or leadscrews.
L52159 Non-Magnetic and Vacuum
Compatible Operating Prin -
ciple
Working Principle for
Application Flexibility
NEXACT
®
PiezoWalk
®
technolo-
gy overcomes the limitations
of conventional nanoposition-
ing drives and combines virtu-
ally unlimited travel ranges
with high stiffness in a very
small package. Furthermore,
NEXACT
®
actuators provide
piezo-class resolution (far
below one nanometer) and
millisecond responsiveness.
The special drive design
reduces the operating voltage
to 45 V and below.
In operation, piezoceramic
ben ding elements act on the
runner, which is connected to
the moving part of the appli -
cation. The length of the run-
ner determines the travel
range. Force capacity, resolu-
tion and velocity are deter-
mined by the piezo geometry
and drive electronics and are
scalable. To move the runner
over longer distances the step-
ping mode is used, whereas for
distances smaller than one
step, the linear (analog) mode
enables high-dynamics posi-
tioning with resolutions far
below one nanometer.
Wear- and Maintenance-Free
In contrast to ordinary DC or
stepper motor drives, the
PiezoWalk
®
drives effect linear
motion directly, without the
need to transform rotation with
mechanical elements such as
gears, leadscrews and
nuts. Therefore, mechanical
limitations such as backlash
and wear are eliminated and
the drive is maintenance-free.
Self-Locking PiezoWalk
®
Piezo
Stepping Drive
NEXLINE
®
and NEXACT
®
exhib-
it high stiffness and are self-
locking even when powered
down due to the clamping
action of the piezo actuators in
the mechanics. This entails
nanometer position stability at
rest, with no heat dissipation
or servo-dither.
Controller and Drive
Electronics Optimized
for the Application
NEXACT
®
actuators require
special drive electronics to
control the complex stepping
sequences. The E-860 series
NEXACT
®
controllers are a -
vaila ble in different open-and
closed-loop versions. For
example, the E-861 includes a
complete NEXACT
®
servo-con-
troller with low-noise, 24-bit
drivers and a powerful DSP. It
also comes with ample soft-
ware for easy integration and
highly effective computer con-
trol. For applications which do
not require the highest reso -
lution lower-priced drive elec-
tronics, ranging all the way to
OEM boards, can be ordered.
The products described in this
document are in part protected
by the following patents:
German Patent No. P4408618.0
N-310 NEXACT
®
OEM Miniature Linear Motor/Actuator
Compact, High-Speed PiezoWalk
®
Drive
L52159 20 mm Standard Travel Range, Flexible Choice of the
Runner Length
L52159 Compact and Cost-Effective Design
L52159 0.03 nm Resolution**
L52159 To 10 N Push/Pull Force
L52159 Low Operating Voltage
L52159 Self Locking at Rest, No Head Dissipation,
Nanometer Stability
L52159 Non-Magnetic and Vacuum-Compatible Working Principle
Application Examples
L52159 Semiconductor technology
L52159 Wafer inspection
L52159 Nano lithography
L52159 Surface Measurement
Technique
L52159 Profilometry
L52159 Microscopy
L52159 Motion in strong magnetic
fields
Ordering Information
N-310.01
NEXACT
®
OEM linear drive,
20 mm, 10 N
Ask about custom designs
N-310 Actuator with E-861 Servo-Controller (integrated drive electronics)
1-12
1-13
DC-Servo & Stepper Actuators
Piezo Actuators & Components
PiezoWalk
®
Motors / Actuators
PILine
®
Ultrasonic Motors
Nanopositioning / Piezoelectrics
Linear Actuators & Motors
Unpackaged Stack Actuators
Guided / Preloaded Actuators
Nanometrology
Micropositioning
Patches /Benders/Tubes /Shear..
Index
Piezo Nano Positioning
Technical Data
Model N-310.01 Tolerance
Active axes X
Motion and positioning
Travel range 20 mm
Step size (in step mode) 5 nm to 5 µm
Travel range in analog operation 7 µm max.
Open-loop resolution 0.03 nm** typ.
Step frequency 1.5 kHz* max.
Max. speed 10 mm/s* max.
Mechanical properties
Push/Pull force (active) 10 N max.
Drive properties
Drive type NEXACT
®
linear drive
Operating voltage -10 V to +45 V
Miscellaneous
Operating temperature range 0 to 50 °C
Body material Stainless steel, non-magnetic
Mass 50 g ±5 %
Cable length 1.5 m ±10 mm
Connector HD Sub-D connector
15 pin, single channel
Recommended controller/driver E-860-series (see p. 1-20)
*Depending on the control electronics.
**Depending on the drive electronics. 5 nm with E-861.
N-310.01 Actuator, dimensions in mm
Translation stage with N-310 NEXACT
®
drive.
The positioner offers 20 mm travel range with
an encoder resolution of 25 nm
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