pi2009
4-59
Piezo Nano Positioning
Single-Channel
Hybrid
Multi-Channel
Translation (X)
Vertical (Y)
Multi-Axis
Nanopositioning / Piezoelectrics
Linear Actuators & Motors
Hexapod 6-Axis Systems /
Parallel Kinematics
Linear Stages
Rotary & Tilt Stages
Accessories
Nanometrology
Micropositioning
Servo & Stepper
Motor Controllers
Micropositioning
Fundamentals
Index
Technical Data
Model M-451.1PD M-451.1DG M-451.12S Unit
Active axes Z Z Z
Motion and positioning
Travel range 12.5 12.5 12.5 mm
Integrated sensor Rotary encoder Rotary encoder
Sensor resolution 4000 2000 cts./rev.
Design resolution 0.042 0.0028 0.026 µm
Min. incremental motion 0.2 0.1 0.2 µm
Backlash 1 1 1 µm
Unidirectional repeatability 0.3 0.3 0.3 µm
Pitch/Yaw ±75 ±75 ±75 µrad
Straightness 1 1 1 µm
Flatness 1 1 1 µm
Max. velocity 3 0.5 0.8 mm/s
Origin repeatability 1 1 1 µm
Mechanical properties
Drive screw Leadscrew Leadscrew Leadscrew
Thread pitch 0.5 0.5 0.5 mm
Gear ratio 29.6:1
Motor resolution* 6,400* steps/rev.
Max. load (self-locking) 120 120 120 N
Drive properties
Motor type ActiveDrive DC Motor DC Motor, gearhead 2-phase stepper motor*
Operating voltage 24 0 to ±12 24 V
Electrical power 25 4 4.8 W
Limit and reference switches Hall-effect Hall-effect Hall-effect
Miscellaneous
Operating temperature range -20 to +50 -20 to +50 -20 to +50 °C
Material Al (black anodized) Al (black anodized) Al (black anodized)
Mass 5 5 5 kg
Recommended controller/driver C-863 (single-axis) C-863 (single-axis, C-663 (single-axis,
C-843 PCI board p. 4-114) p. 4-112)
(up to 4 axes) C-843 PCI board
(up to 4 axes, p. 4-120)
*2-phase stepper motor, 24 V chopper voltage, max. 0.8 A/phase, 400 full steps/rev., motor resolution
with C-663 stepper motor controller
P-562.3CD PIMars
TM
XYZ piezo-
nanopositioning & scanning system
(200 µm x 200 µm x 200 µm)
mounted on an
M-451.1PD elevation stage
M-451.1PD precision elevation Z-stage dimensions in mm.
Sub-D connector 15-pin, 3 m cable
M-451.1DG precision elevation Z-stage dimensions in mm.
Sub-D connector 15-pin, 3 m cable
©
Physik
Instrumente
(PI)
GmbH
&
C
o.
KG
2008.
Subject
to
c
hange
without
notice.
All
data
are
s
uperseded
by
any
new
release.
The
newest
r
elease
for
data
sheets
is
available
for
download
at
www
.pi.ws.
C
at120E
Inspirations2009
08/10.18
Piezo Nano Positioning
M-501 Precision Vertical Stage
Compact XYZ Combinations with M-511 Translation Stage Series
The M-501 Z-stage is the latest
family member of the M-500
series of translation stages. It is
ideal for forming compact XYZ
combinations together with the
low-profile M-511, M-521 and
M-531 translation stages.
M-501 vertical stages feature a
precision-machined base of
high-density, stress-relieved
aluminum for exceptional
stability and minimum weight.
Precision-ground recirculating
ball screws with preloaded
nuts provide low-friction, main-
tenance-free and backlash-free
positioning.
Two DC-motor drives are cur-
rently available:
M-501.1PD with ActiveDrive
for High Velocity
This model features an ultra-
high-resolution ballscrew-moun-
ted encoder (40 960 counts/rev!)
and provides a minimum incre-
mental motion of better than
100 nanometers (design reso-
lution 24 nm).
For superior dynamic perform-
ance the ActiveDrive motor is
integrated. The ActiveDrive
design, developed by PI, fea-
tures a high-efficiency PWM
(pulse width modulation)
servo-amplifier mounted side-
by-side with the DC motor and
offers several advantages:
L52159 Increased efficiency, by
eliminating power losses
between the amplifier and
motor
L52159 Reduced cost of ownership
and improved reliability be-
cause no external driver is
required
L52159 Elimination of PWM amplifi-
er noise radiation, by moun-
ting the amplifier and motor
together in a single, electri-
cally shielded case
M-501.1DG with Gearhead
These versions feature closed-
loop DC motors with shaft-
mounted position encoders
and precision gearheads pro-
viding a minimum incremental
motion to 0.1 µm and 5 nano-
meter encoder resolution.
The gearhead version can hold
loads to 10 kg in power-off
mode.
Limit and Reference Switches
For the protection of your
equipment, non-contact Hall-
effect limit and reference
switches are installed. The
direction-sensing reference
switch supports advanced
automation applications with
high precision.
Notes
For adapters, bracket, etc. (see
p. 4-90).
Application Examples
L52159 R&D
L52159 Semiconductor testing
L52159 Mass storage device
testing
L52159 Metrology
L52159 Photonics packaging
L52159 Quality assurance testing
Ordering Information
M-501.1PD
Vertical Stage, 12.5 mm,
ActiveDrive DC Motor (includes
24 V power supply)
M-501.1DG
Vertical Stage, 12.5 mm,
DC Motor Gearhead
Ask about custom designs!
L52159 Travel Range 12.5 mm (1/2)
L52159 Ultra-High-Resolution Encoder
L52159 ActiveDrive Motor
L52159 Zero-Backlash Recirculating Ballscrews
L52159 Non-Contact Limit and Reference Switches
L52159 Stress-Relieved Aluminum Base for Highest Stability
L52159 MTBF >20,000 h
L52159 Self Locking to 10 kg
M-501.1PD vertical stage
XYZ combination of M-521.DD (204 mm),
M-511.DD (102 mm) and M-501.1PD vertical stage
4-60
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