pi2009
1-10
© Physik Instrumente (PI) GmbH & Co. KG 2008. Subject to change without notice. All data are superseded by any new release. The newest release for data sheets is available for download at www
.pi.ws. Cat120E Inspirations2009 08/10.18
Piezo Nano Positioning
Application example
L52159 Semiconductor
tech nology
L52159 Semiconductor testing
L52159 Wafer inspection
L52159 Nano lithography
L52159 Nano imprint
L52159 Nanometrology
L52159 Active vibration damping
L52159 Motion in strong
magnetic fields
N-214, N-215 NEXLINE
®
Linear Motor/Actuator
High-Force PiezoWalk
®
Drive for Long-Range Nanopositioning
The innovative N-214 / N-215
NEXLINE
®
OEM linear drives
are ultra-precision nanoposi-
tioning actuators with travel
ranges to 20 mm and push /
pull forces to 400 N. The novel,
patented NEXLINE
®
PiezoWalk
®
drive design combines long
travel ranges with high
mechanical stiffness and piezo-
class resolution of better than
0.1 nm.
PiezoWalk
®
supports two differ-
ent motion modes: a high-reso -
lution, high-dynamics short
range (analog) mode and a
stepping mode with virtually
unlimited travel range.
Two versions are available, the
N-214 closed-loop model and
N-215 open-loop model. Both
can be operated with the
sophisticated E-755 NEXLINE
®
motion controller. The N-214 is
equipped with a 5 nm resolu-
tion linear encoder for long-
range position control. Due to
its low-noise, 24 bit D/A con ver -
ters, the E-755 controller can
provide picometer level resolu-
tion in the highly-dynamic
short-range / dithering mode.
NEXLINE
®
Working Principle
for Application Flexibility
NEXLINE
®
PiezoWalk
®
drives
can be used wherever high
loads must be positioned very
precisely over long distances
and then perhaps subjected to
small-amplitude dynamic ad -
justment, as for active vibra-
tion control. By varying the
combination of longitudinal
and shear piezo elements, the
step size, dynamic operating
range (analog travel), clamping
force, speed and stiffness can
all be optimized for a particular
application.
NEXLINE
®
PiezoWalk
®
Piezo -
ceramic clamping and shear
elements act directly on a mov-
ing runner that is coupled to
the moved object. While the
runner can be moved larger
distances in step mode, analog
operation over a distance of
less than one step enables
high-dynamics positioning
with resolutions far below
one nanometer. The patented
PiezoWalk
®
overcomes the limi-
tations of conventional nanopo-
sitioning actuators and com-
bines long travel ranges with
high resolution and stiffness.
High-Resolution Dynamic
Operation
In analog mode the motion is
effectuated exclusively by the
very stiff shear elements, pro-
viding a resonant frequency in
the direction of motion of sev-
eral kilohertz. The motion reso-
lution here is limited only by
the stability of the drive elec-
tronics, or, in closed-loop oper-
ation, by the sensor.
Basically Unlimited Travel
Range
Step mode involves a sequence
of coordinated shear and
clamping moves. That is why
piezo stepping drives have no
intrinsic travel limitation and
can be used flexibly. The max.
step frequency of 100 Hz and is
determined by the controller.
It allows velocities up to
1 mm/s, depending on the step
size and / or analog range.
Unlimited Lifetime
The application area of NEX -
LINE
®
drives often lies in the
difficult-to-access internals of
machines, where nanometer-
realm adjustment and vibra tion
cancellation are required.
Long lifetime is therefore a
basic requirement for NEX -
LINE
®
actuators. To promote
long lifetime, the controller can
reduce the operating voltage
on all the piezo elements to
zero at any position and still
maintain the full holding force.
Note
The products described in this
document are in part protected
by the following patents:
German Patent No. 10148267
US Patent No. 6,800,984
Ordering Information
N-214.00
NEXLINE
®
High-Load Actuator,
20 mm, 200 N, linear encoder,
5 nm resolution
N-215.00
NEXLINE
®
High-Load Actuator,
20 mm, 400 N, open-loop
L52159 20 mm Travel Range
L52159 0.03 nm Resolution Open-Loop and 5 nm Closed-Loop
L52159 To 400 N Push / Pull Force and 600 N Holding Force
L52159 Self Locking when Power down, No Heat Generation
L52159 Non-Magnetic and Vacuum-Compatible Working Principle
N-215 NEXLINE
®
high-load actuator
Train of 1 nm steps in open-loop analog mode with an N-215 NEXLINE
®
actuator
1-11
Piezo Nano Positioning
DC-Servo & Stepper Actuators
Piezo Actuators & Components
PiezoWalk
®
Motors / Actuators
PILine
®
Ultrasonic Motors
Nanopositioning / Piezoelectrics
Linear Actuators & Motors
Unpackaged Stack Actuators
Guided / Preloaded Actuators
Nanometrology
Micropositioning
Patches /Benders/Tubes /Shear..
Index
Model N-214.00 N-215.00
Active Axes X X
Motion and positioning
Travel range 20 mm 20 mm
Step size in stepping mode 10 nm to 6 µm 10 nm to 6 µm
Integrated sensor Linear encoder
Sensor resolution 5 nm
Travel range in analog mode 3 µm 3 µm
Open-loop resolution 0.03 nm 0.03 nm
Closed-loop resolution 5 nm
Step frequency 100 Hz* 100 Hz*
Open-loop velocity** 0.3 mm/s 0.3 mm/s
Closed-loop velocity** 0.15 mm/s
Mechanical properties
Stiffness in motion direction 75 N/µm 150 N/µm
Drive force (active) 200 N 400 N
Holding force (passive) 300 N 600 N
Drive properties
Drive type NEXLINE
®
linear drive NEXLINE
®
linear drive
Operating voltage ±250 V ±250 V
Miscellaneous
Operating temperature range -40 to 80 °C -40 to 80 °C
Material Al (anodized), steel Al (anodized), steel
Mass 1050 g 1150 g
Cable length 4.0 m 2.0 m
Connector D-sub single-channel D-sub single-channel
NEXLINE
®
connector, NEXLINE
®
connector
plus separate sensor connector
Recommended controller / driver E-755.1A1 (see p. 1-18) E-755.101 (see p. 1-18)
*Depends on control electronics
**Depends on control electronics. The maximum speed in step mode is set so as to ensure the highest possible velocity constancy, with no speed
fluctuations while steps are being performed.
Six-axis parallel-kinematics Hexapod with N-215-based
NEXLINE
®
high-load actuators for use in strong magnetic fields.
NEXLINE
®
linear actuator principle
www.pionline.it, www.pifrance.fr, www.pi-china.cn, www.goa-tech.co.il, www.alt.nl, www.bfioptilas.es, www.pi.ws, www.piceramic.de, www.pi-usa.us, www.pi-usa.us, www.pi-japan.jp, www.pi-japan.jp, www.physikinstrumente.co.uk, www.dyneos.ch, www.parameter.se, dms@deepms.com, www.deepms.com, www.warsash.com.au, www.parameter.se, www.eliovac.com.ar, www.rsdobrasil.com.br, www.woojoohitech.com, www.cairnhill.com, www.tetmakina.com, Seewww.piceramic.com, Seep.1-94ff.andwww.piceramic.com, Seewww.piceramic.com, Seealsowww.piceramic.com, andoscillatingmotione.g.in, info@pi-usa.us, www.pi-usa.us, info@pi-usa.us, www.pi-usa.us, info@pi-japan.jp, www.pi-japan.jp, info@pi-japan.jp, www.pi-japan.jp, info@pi-china.cn, www.pi-china.cn, info@pifrance.fr, www.pifrance.fr, uk@pi.ws, www.physikinstrumente.co.uk, info@pionline.it, www.pionline.it, info@piceramic.de, www.piceramic.de,
www.publitas.com, www.publitas.nl
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