pi2009
4-39
Single-Channel
Hybrid
Multi-Channel
Translation (X)
Vertical (Y)
Multi-Axis
Nanopositioning / Piezoelectrics
Linear Actuators & Motors
Hexapod 6-Axis Systems /
Parallel Kinematics
Linear Stages
Rotary & Tilt Stages
Accessories
Nanometrology
Micropositioning
Servo & Stepper
Motor Controllers
Micropositioning
Fundamentals
Index
Piezo Nano Positioning
M-126.PD1 / .PD2 Dimensions in mm.
Sub-D connector 15-pin, 3 m cable
M-126.DG1 Dimensions in mm.
Sub-D connector 15-pin, 3 m cable
M-126.M0 Dimensions in mm.
Sub-D connector 15-pin, 3 m cable
Technical Data
Model M-126.M0 M-126.CG1 M-126.DG1 M-126.PD1 M-126.PD2 M-126.2S1 Units
Active Axes X X X X X X
Motion and positioning
Travel range 25 25 25 25 20 25 mm
Integrated sensor Rotary encoder Rotary encoder Rotary encoder Rotary encoder
Sensor resolution 2048 2000 4000 4000 Cts./rev
Design resolution 0.0035 0.0085 0.125 0.25 0.08** µm
Min. incremental motion 1 0.1 0.1 0.25 0.5 0.1** µm
Unidirectional repeatability 0.2 0.1 0.1 ± 0.3 0.1** µm
Bidirectional repeatability 2 1 1 1 1** µm
Accuracy 2.5 2.5 2.5 2.5 2.5 µm
Pitch / Yaw ±50 ±50 ±50 ±50 ±50 ±50 µrad
Straightness / Flatness 2 2 2 2 2 2 µm
Max. velocity 0.7 1.5 15* 50 6** mm/s
Origin repeatability 1 1 1 1 1 µm
Mechanical properties
Drive Screw Leadscrew Leadscrew Leadscrew Leadscrew Recirculating Leadscrew
ballscrew
Thread pitch 0.5 0.5 0.5 0.5 1 0.5 mm
Gear ratio 69.12:1 (28/12)
4
:01
~ 29.6:1
Motor resolution 6400** steps/rev.
Max. load 200 200 200 200 200 200 N
Max. push / pull force 50 / 50 40 / 40 50 / 50 50 / 50 40 / 40 50 / 50 N
Max. lateral force 100 100 100 100 100 100 N
Drive properties
Motor type DC Motor, DC Motor, ActiveDrive ActiveDrive 2-phase
gearhead gearhead DC Motor DC Motor stepper motor
Operating voltage 0 to ±12 0 to ±12 24 (PWM) 24 (PWM) 24 V
Electrical power 2 3 30 30 W
Limit and reference switches Hall-effect Hall-effect Hall-effect Hall-effect Hall-effect
Miscellaneous
Operating temperature range -20 to +65 -20 to +65 -20 to +65 -20 to +65 -20 to +65 -20 to +65 °C
Material Aluminum, steel Aluminum, steel Aluminum, steel Aluminum, steel Aluminum, steel Aluminum, steel
Mass 0.6 0.8 0.9 0.9 0.9 1 kg
Recommended C-863 single-axis C-863 single-axis C-863 single-axis C-863 single-axis (p. 4-114) C-663 single-axis
controller/driver C-843 PCI board, C-843 PCI board, C-843 PCI board, C-843 PCI board (p. 4-120), (p. 4-112)
for up to 4 axes for up to 4 axes for up to 4 axes for up to 4 axes
*Max. recommended velocity
**2-phase stepper motor, 24 V chopper voltage, max. 0.8 A/phase, 400 full steps/rev., motor resolution with C-663 stepper motor controller
4-40
©
Physik
Instrumente
(PI)
GmbH
&
C
o.
KG
2008.
Subject
to
c
hange
without
notice.
All
data
are
s
uperseded
by
any
new
release.
The
newest
r
elease
for
data
sheets
is
available
for
download
at
www
.pi.ws.
C
at120E
Inspirations2009
08/10.18
Piezo Nano Positioning
M-400 series translation stages
are compact, leadscrew-driven
stages with a travel range of
50, 100 and 150 mm. All mod-
els are equipped with low-fric-
tion leadscrews for excellent
resolution and repeatability.
Precision crossed roller bear-
ings guarantee 2 µm/100 mm
straightness of travel. The
stage base is precision ma-
chined from high-density,
stress-relieved aluminum for
exceptional stability and mini-
mum weight.
Five Versions
One manual and four motor-
ized versions are available:
Models M-4xx.2S are equipped
with direct-drive, 2-phase step-
per motors providing 0.1 µm
minimum incremental motion.
Models M-4xx.CG and
M-4xx.DG utilize closed-loop
DC motors with shaft-mounted
position encoders and preci-
sion gearheads providing
0.1 µm minimum incremental
motion (encoder resolution
3 nm). The top-of-the-line
M-4xx.PD versions feature the
high-performance ActiveDrive
system.
ActiveDrive
The ActiveDrive design,
developed by PI, features a
high-efficiency PWM (pulse
width modulation) servo-
amplifier mounted side-by-side
with the DC motor and offers
several advantages:
L52159 Increased efficiency, by
eliminating power losses
between the amplifier and
motor
L52159 Reduced cost of ownership
and improved reliability,
because no external driver
is required
L52159 Elimination of PWM amplifi-
er noise radiation, by moun-
ting the amplifier and motor
together in a single, electri-
cally shielded case
Limit and Reference Switches
For the protection of your
equipment, non-contact Hall-
effect limit and reference
switches are installed. The
direction-sensing reference
Ordering Information
Translation Stage
Ask about custom designs!
M-4 .
05 Travel Range 50 mm
10 Travel Range 100 mm
15 Travel Range 150 mm
CG DC Motor Gearhead
DG DC Motor Gearhead
PD ActiveDrive DC Motor,
Includes 24 V Power Supply
2S 2-Phase Stepper Motor
M0 Manual Drive
M-405 · M-410 · M-415 Precision Translation Stage
High-Load Linear Stage with Crossed Roller Bearings
M-410.CG, M-415.CG
dimensions in mm, cable length 3 m, Sub-D connector 15-pin
L52159 Travel Ranges up to 150 mm
L52159 Stress-Relieved Aluminum Base for Highest Stability
L52159 Crossed Roller Bearings
L52159 Manual, DC-Servo and Stepper-Motor Drives
L52159 Knob for Convenient Manual Position Adjustment
L52159 Direction-Sensing Reference Switch
M-405.DG, M-410.DG and
M-415.PD high-precision translation stages
Application Examples
L52159 Automation
L52159 R&D
L52159 Semiconductor technology
L52159 Metrology
L52159 Quality assurance testing
switch supports advanced
automation applications with
high precision (motorised ver-
sions only). All stages of this
series can be cross stacked and
combined with the M-592.00
Z-axis mounting bracket to pro-
vide multi-axis motion.
Notes
See Accessories for adap-
ters, bracket, etc. (p. 4-90 ff ).
www.pionline.it, www.pifrance.fr, www.pi-china.cn, www.goa-tech.co.il, www.alt.nl, www.bfioptilas.es, www.pi.ws, www.piceramic.de, www.pi-usa.us, www.pi-usa.us, www.pi-japan.jp, www.pi-japan.jp, www.physikinstrumente.co.uk, www.dyneos.ch, www.parameter.se, dms@deepms.com, www.deepms.com, www.warsash.com.au, www.parameter.se, www.eliovac.com.ar, www.rsdobrasil.com.br, www.woojoohitech.com, www.cairnhill.com, www.tetmakina.com, Seewww.piceramic.com, Seep.1-94ff.andwww.piceramic.com, Seewww.piceramic.com, Seealsowww.piceramic.com, andoscillatingmotione.g.in, info@pi-usa.us, www.pi-usa.us, info@pi-usa.us, www.pi-usa.us, info@pi-japan.jp, www.pi-japan.jp, info@pi-japan.jp, www.pi-japan.jp, info@pi-china.cn, www.pi-china.cn, info@pifrance.fr, www.pifrance.fr, uk@pi.ws, www.physikinstrumente.co.uk, info@pionline.it, www.pionline.it, info@piceramic.de, www.piceramic.de,
www.publitas.com, www.publitas.nl
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