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Physik
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Cat120E
Inspirations2009
08/10.18
Piezo Nano Positioning
1-8
The innovative N-111 NEX-
LINE
®
OEM drives are compact
actuators for nanopositioning
with travel ranges to 5 mm,
high resolution, and generated
forces to 40 N.
Two versions are available, the
N-111.3A closed-loop model
and N-111.30 open-loop mo-
del. Both can be operated
with the sophisticated E-755
NEXLINE
®
motion controller.
The N-111.3A is equipped with
a 5 nm resolution linear enco-
der for long-range position
control. Due to its low-noise,
24 bit D/A converters, the E-755
controller can provide pico-
meter level resolution in the
highly-dynamic short-range /
dithering mode.
NEXLINE
®
Working Principle
for Application Flexibility
NEXLINE
®
PiezoWalk
®
drives
can be used wherever high
loads must be positioned very
precisely over long distances
and then perhaps subjected to
small-amplitude dynamic ad-
justment, as for active vibra-
tion control. By varying the
combination of longitudinal
and shear piezo elements, the
step size, dynamic operating
range (analog travel), clamping
force, speed and stiffness can
all be optimized for a particular
application.
NEXLINE
®
PiezoWalk
®
Piezo-
ceramic clamping and shear
elements act directly on a mov-
ing runner that is coupled to
the moved object. While the
runner can be moved larger
distances in step mode, analog
operation over a distance of
less than one step enables
high-dynamics positioning
with resolutions far below one
nanometer. The patented
PiezoWalk
®
overcomes the
limitations of conventional
nanopositioning actuators and
combines long travel ranges
with high resolution and stiff-
ness.
Advantages of PiezoWalk
®
Piezo Stepping Drives
NEXLINE
®
and NEXACT
®
drives
offer several advantages over
traditional drive technologies:
L52159 Resolution in the picometer
range
L52159 Compact dimensions
L52159 High drive forces from ten
newtons (NEXACT
®
)upto
several hundred newtons
(NEXLINE
®
)
L52159 High dynamic performance
with sub-microsecond res-
ponse
L52159 Self-locking when powered
down; no holding current
L52159 Zero backlash, no wear or
maintenance, no mechanical
components like gears or
leadscrews.
L52159 Non-magnetic and vacuum
compatible operating prin-
ciple
NEXLINE
®
Actuators are
Distinguished by a Number of
Unique Outstanding Features:
L52159 Cleanroom compatibility
L52159 Vacuum compatibility
L52159 Operation under conditions,
which prohibit usage of
magnetic drives
Notes
The products described in this
document are in part protected
by the following patents:
German Patent No. 10148267
US Patent No. 6,800,984
N-111 NEXLINE
®
OEM Linear Motor/Actuator
PiezoWalk
®
Drive for Long-Range Nanopositioning
Ordering Information
N-111.30
NEXLINE
®
OEM Nanopositioning
Drive, 5 mm, 40 N
N-111.3A
NEXLINE
®
OEM Nanopositioning
Drive, 5 mm, 40 N, Closed-Loop,
5 nm Resolution
Ask about custom designs
Application Examples
L52159 Semiconductor
technology
L52159 Semiconductor testing
L52159 Wafer inspection
L52159 Nano lithography
L52159 Nano imprint
L52159 Nanometrology
L52159 Active vibration damping
L52159 Motion in strong
magnetic fields
L52159 5 mm Travel
L52159 0.025 nm Open-Loop Resolution and 5 nm Closed-Loop
Resolution
L52159 To 40 N Pull / Push Force and 60 N Holding Force
L52159 Self Locking at Rest, no Heat Generation
L52159 Non-Magnetic and Vacuum-Compatible Working Principle
Z / tip / tilt platform with NEXLINE
®
drives and position sensors;
300 mm (12) diameter, 200 N load capacity, 1.3 mm travel range, 10 mrad tilt range
N-111 compact high-load OEM
nanopositioning actuator
1-9
DC-Servo & Stepper Actuators
Piezo Actuators & Components
PiezoWalk
®
Motors / Actuators
PILine
®
Ultrasonic Motors
Nanopositioning / Piezoelectrics
Linear Actuators & Motors
Unpackaged Stack Actuators
Guided / Preloaded Actuators
Nanometrology
Micropositioning
Patches /Benders/Tubes /Shear..
Index
Piezo Nano Positioning
Technical Data
Model N-111.30 N-111.3A Tolerance
Active axes X X
Motion and positioning
Travel range 5 mm 5 mm
Step size (in step mode) 10 nm to 5 µm 10 nm to 5 µm
Integrated sensor Linear encoder
Sensor resolution 5 nm
Analog mode travel range 2.5 µm 2.5 µm Max.
Open-loop resolution 0.025 nm 0.025 nm Typ.
Closed-loop resolution 5 nm
Step frequency 100 Hz* 100 Hz*
Open-loop velocity** 0.2 mm/s 0.2 mm/s
Closed-loop velocity** 0.1 mm/s
Mechanical properties
Stiffness in motion direction 15 N/µm 15 N/µm ±20 %
Push / Pull force (active) 40 N 40 N Max.
Holding force (passive) 60 N 60 N Min.
Drive properties
Drive type NEXLINE
®
linear drive NEXLINE
®
linear drive
Operating voltage ±250 V ±250 V
Miscellaneous
Operating temperature range -40 to 80 °C -40 to 80 °C
Material Al (anodized), steel Al (anodized), steel
Mass 115 g 135 g ±5 %
Cable length 1.5 m 1.5 m ±10 mm
Connector Sub-D NEXLINE
®
connector, Sub-D NEXLINE
®
connector,
single-channel single-channel; sensor connector
Recommended controller / driver E-755.101 (see p. 1-18) E-755.1A1 (see p. 1-18)
*Depends on control electronics
**Depends on control electronics. The maximum speed in step mode is set so as to ensure the highest possible velocity constancy, with no speed
fluctuations while steps are being performed.
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2 31 4
N-111 dimensions in mm
www.pionline.it, www.pifrance.fr, www.pi-china.cn, www.goa-tech.co.il, www.alt.nl, www.bfioptilas.es, www.pi.ws, www.piceramic.de, www.pi-usa.us, www.pi-usa.us, www.pi-japan.jp, www.pi-japan.jp, www.physikinstrumente.co.uk, www.dyneos.ch, www.parameter.se, dms@deepms.com, www.deepms.com, www.warsash.com.au, www.parameter.se, www.eliovac.com.ar, www.rsdobrasil.com.br, www.woojoohitech.com, www.cairnhill.com, www.tetmakina.com, Seewww.piceramic.com, Seep.1-94ff.andwww.piceramic.com, Seewww.piceramic.com, Seealsowww.piceramic.com, andoscillatingmotione.g.in, info@pi-usa.us, www.pi-usa.us, info@pi-usa.us, www.pi-usa.us, info@pi-japan.jp, www.pi-japan.jp, info@pi-japan.jp, www.pi-japan.jp, info@pi-china.cn, www.pi-china.cn, info@pifrance.fr, www.pifrance.fr, uk@pi.ws, www.physikinstrumente.co.uk, info@pionline.it, www.pionline.it, info@piceramic.de, www.piceramic.de,
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