pi2009
Micropositioning
Linear Stages
Piezo Nano Positioning
4-20
Piezo Nano Positioning
Selection Guide: Linear Translation Stages
Models Description Precision* Max. Speed Load Capacity Travel Page
[mm/s] [kg] [mm]
Many Motor Options, Travel 5 to 300 mm. Sub-µm to 2 Nanometer Precision
V-106 Voice-coil scanner, very fast, to 25 Hz scanning frequency ????? to 270 0.1 6, 20 4-48
M-110/11/12 Mini translation stage, choice of DC,stepper, ballscrew, leadscrew ????? to 2 3 5, 15, 25 4-22
PI motorized translation stages
are available with a number of
different drive options, from
stepper motors to ceramic ultra-
sonic linear motors. All models
provide sub-micron resolution,
the hybrid models achieve true
2 nanometer resolution. Speeds
reach up to 400 mm/sec.
M-122.2DD Fast mini translation stage w/ linear encoder, DC direct drive, ballscrew ????? 20 5 25 4-24
N-661 NEXACT
®
Miniature Linear Slide, subnanometer resolution ????? 10 20 4-25
P-653 PILine
®
miniature linear motor / slide: 8 mm length, PCB-mounted 200 0.015 2 1-32
M-661, M-662 Piezo motor driven stage speed to 400 mm/s, 0.1 µm resolution ????? 400 0.5 19 4-26
M-663 Smallest stage with linear motor and linear encoder, speed to 400 mm/s, ????? 400 0.5 19 4-28
0.1 µm linear encoder. XY-combinations possible
M-664 Low-profile, high speed stage, piezo linear motor, 0.1 µm linear encoder ????? 400 0.5 25 4-30
M-682 Low-profile, high speed stage, piezo linear motor, 0.1 µm linear encoder ????? 400 5 50 4-32
M-664KCEP High-speed stackable PILine
®
actuator ????? 400 0.5 50 4-57
M-126 Compact, crossed roller bearings, very high resolution, choice of motors ????? 1 to 50 20 25 4-38
M-405 / 10 / 15 Crossed roller bearings, very high resolution, choice of motors ????? 1 to 6 50 50, 100, 150 4-40
V-106 Voice Coil Scanner.
20 mm, up to 25 Hz
M-110 M-112 Very small,
high resolution
M-122.2DD Fast mini stage w/
linear encoder
P-653 PCB-mounted
sub-miniature stage
M-661, M-662 Very small &
fast, piezo linear motor
M-664 Linear motor & linear
encode, fast.
M-682 Low-profile,
high speed piezo linear motor
M-664KCEP Stackable,
cost-effective PILine
®
actuator
M-126 Compact, very high
resolution
M-405, M-410, M-415 very
high precision
M-663 Small, fast; linear
motor & linear encoder
M-605 Compact, bellows,
linear encoder
M-605 Compact, integrated linear encoder, very high accuracy, protective bellow ????? 50 20 25, 50 4-42
M-511, M-521, Ballscrew drive, high load capacity and lifetime, ?????/????? 6 to 125 100 102, 204, 306 4-44
M-531 optional linear encoder, choice of motors
M-511.HD, Hybrid drive. DC motor & piezo. Extremely accurate. 2 nm linear encoder ????? 125, 0.2 100, 20 102, 7 4-46
M-714 4-62
M-403KSTS With integrated stepper motor controller, 0.5 µm resolution ????? 10 50 200 4-56
M-403, M-404 Low-cost translation stages. Choice of leadscrew and ballscrew drive ?????/????? 1.5 to 50 20 25 -200 4-34
M-413, M-414 Low-cost translation stages. Choice of leadscrew and ballscrew drive ?????/????? 1.5 to 50 50 100-300 4-36
M-011, M-014 Magnetic bearings. Low profile, excellent guidance, ????? 1 to 5 15, 25 4-52
10 nm resolution with piezo option 4-54
M-511 / 521 / 531 high-load,
high precision
M-511.HD, M-714 Hybrid,
stage, extremely accurate
M-403KSTS Stage with
integrated motor controller
M-403, M-404, M-413, M-414
Low-cost
M-011, M-014 Side-drive, mag-
netic-bearings
M-105, M-106 Manual
translation stages
M-105, M-106 Manual stages with motor and piezo options, crossed roller bearings 10 6, 18 4-50
*Relative to similar products in this class. Combination of guiding precision, drive principle and encoder type.
©
Physik
Instrumente
(PI)
GmbH
&
C
o.
KG
2008.
Subject
to
c
hange
without
notice.
Cat120E
Inspirations2009
08/10.18
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pi2009 main
