pi2009
1-4
©
Physik
Instrumente
(PI)
GmbH
&
Co.
KG
2008.
Subject
to
change
without
notice.
Cat120E
Inspirations2009
08/10.18
Piezo Nano Positioning
Selection Guide: PiezoWalk
®
Actuators
Models Description Travel [mm] Push/Pull Page
Force [N]
Piezo Linear Motor Solutions: Actuators to 6-Axis Stages
N-310 NEXACT
®
ultra-compact nanopositioning motor, subnanometer resolution. 20 10 1-12
N-380 NEXACT
®
compact nanopositioning actuator 20 10 1-14
PiezoWalk
®
non-resonant piezo
stepping motors can provide
much higher resolution (to Pico-
meters) and forces (to 600 N)
than other types of piezo motors.
They generate motion through
succession of coordinated
clamp/unclamp of several actua-
tors. PI offers two basic types:
the high-force NEXLINE
®
drives
(higher forces, lower speed) and
the ultra-compact NEXACT
®
motors (higher speed, lower
force). All linear drives and
motors are intended for integra-
tion into a customer's system
and feature no guidance. If off-
axis motion cannot be tolerated
external guidance is required.
N-111 NEXLINE
®
PiezoWalk
®
nanopositioning motor, subnanometer resolution. 5 80 1-8
N-214, High force NEXLINE
®
nanopositioning motor, subnanometer resolution, closed-loop option. 20 to 600 1-10
N-215
N-661 NEXACT
®
miniature linear slide, subnanometer resolution 20 10 1-16
N-510 Tripod Z-Tip/Tilt nanopositioning platform with NEXLINE
®
piezo motor actuators 1.3, 10 mrad 200 1-17
N-515KNPH Nonmagnetic 6-axis piezo Hexapod precision positioning system with NEXLINE
®
piezo motor actuators to 10 mm / 6° 500 1-17
N-510KHFS Tripod Z-Tip/Tilt nanopositioning platform with additional fine positioning 0.4 plus 40 µm 25 1-17
N-310 NEXACT
®
compact
nanopositioning motor,
sub-nm resolution
N-380 NEXACT
®
compact
nanopositioning actuator
N-111 NEXLINE
®
PiezoWalk
®
motor, sub-nm resolution
N-214, N-215 NEXLINE
®
high-load motor
N-661 NEXACT
®
miniature
slide
N-510 Tripod Z-tip/tilt nano-
positioning platform
N-515KNPH: non-magnetic
6-axis Hexapod
E-755 NEXLINE
®
piezo motor
controller
E-861 NEXACT
®
piezo motor
controller
N-510KHFS high-load Z/tip/tilt
NEXLINE
®
stage
Models Description Channels Voltage [V] Power [W] Interface Page
E-755 Piezo controller for NEXLINE
®
linear motors and positioners 1 ±250 15 RS-232 1-18
E-861 Networkable controller for NEXACT
®
linear motors and positioners 1 -10 to +45 40 USB, RS-232 1-20
Controllers for PiezoWalk
®
Actuators
More ceramic actuators: See p. 1-23 ff &1-61ff
Classical motorized linear actuators: See p. 1-39 ff
Notes on specifications see p. 1-22
1-5
Piezo Nano Positioning
DC-Servo & Stepper Actuators
Piezo Actuators & Components
PiezoWalk
®
Motors / Actuators
PILine
®
Ultrasonic Motors
Nanopositioning / Piezoelectrics
Linear Actuators & Motors
Unpackaged Stack Actuators
Guided / Preloaded Actuators
Nanometrology
Micropositioning
Patches /Benders/Tubes /Shear..
Index
PiezoWalk
®
drives break away
from the limitations of conven-
tional Nanopositioning actua-
tors. They offer a basically
unlimited travel range and
still provide the characteristic
features of a piezoelectric
actuator: an open-loop resolu-
tion down to 30 picometers and
a very high stiffness for dynam-
ic operation and force genera-
tion. PI offers two product lines
based on different versions
of the PiezoWalk
®
principle:
NEXLINE
®
and NEXACT
®
.Both
provide specific advantages
depending on the application.
PiezoWalk
®
piezo stepping
drives usually consist of sever-
al individual piezo actuators
and generate motion through
succession of coordinated
clamp / unclamp and shear-
motion cycles (steps). Each
cycle provides only a few
microns of motion, but running
at hundreds of hertz, the drive
achieves continuous motion in
the mm/second range.
The PiezoWalk
®
working princi-
ple provides high force capabil-
ities, resolution and repeatabil-
ity. These properties are typi-
L52159 PiezoWalk
®
drives are availa-
ble for non-magnetic appli-
cations such as super-con-
ductivity experiments. They
do not create magnetic
fields nor are they influen-
ced by them.
L52159 The active parts in
PiezoWalk
®
drives are made
of vacuum-compatible cera-
mics. The drives also work
in UV-light environments.
L52159 NEXLINE
®
drives can survive
shock loads of several g
during transportation.
L52159 PiezoWalk
®
drives are
available in three levels
of integration to provide
flexibility for OEMs: OEM
drives, packaged actuators
and integrated into
complex positioning
systems such as multi-axis
translation stages or 6-DOF
Hexapods.
cally better for piezo stepping
actuators compared to inertia
drives or ultrasonic motors.
The operation is possible in
two different modes: a high-
resolution, high dynamics ana-
log mode within a single step,
and a step mode with virtually
unlimited travel range.
50 picometer steps with a NEXLINE
®
drive, measured with external ultra-
high-resolution capacitive sensor.
This performance provides a big safety
margin for next generation nano-
technology applications
Features and Advantages of
PiezoWalk
®
Drives
L52159 Very high resolution, limited
typically only by the sensor.
In fine-adjustment, analog
mode, resolution of 30 pico-
meters has been demonstra-
ted.
L52159 High force generation and
stiffness. NEXLINE
®
drives
can hold and generate for-
ces to 600 N, NEXACT
®
to
15 N.
L52159 PiezoWalk
®
drives hold a
stable position to nanome-
ter level in power-off mode.
Due to the actuator design,
the maximum clamping
force is applied at rest.
L52159 Because a position can be
held with zero operating vol-
tage, leakage currents can-
not affect the integrity of the
piezo drive.
6-axis parallel-kinematic nanopositioning system (Hexapod) with N-215
based NEXLINE
®
high-load actuators for use in strong magnetic fields
Custom PiezoWalk
®
linear actuator
NEXLINE
®
linear
actuator principle
Millimeter Travel, Nanometer Resolution, High Forces
PiezoWalk
®
Precision Drives
www.pionline.it, www.pifrance.fr, www.pi-china.cn, www.goa-tech.co.il, www.alt.nl, www.bfioptilas.es, www.pi.ws, www.piceramic.de, www.pi-usa.us, www.pi-usa.us, www.pi-japan.jp, www.pi-japan.jp, www.physikinstrumente.co.uk, www.dyneos.ch, www.parameter.se, dms@deepms.com, www.deepms.com, www.warsash.com.au, www.parameter.se, www.eliovac.com.ar, www.rsdobrasil.com.br, www.woojoohitech.com, www.cairnhill.com, www.tetmakina.com, Seewww.piceramic.com, Seep.1-94ff.andwww.piceramic.com, Seewww.piceramic.com, Seealsowww.piceramic.com, andoscillatingmotione.g.in, info@pi-usa.us, www.pi-usa.us, info@pi-usa.us, www.pi-usa.us, info@pi-japan.jp, www.pi-japan.jp, info@pi-japan.jp, www.pi-japan.jp, info@pi-china.cn, www.pi-china.cn, info@pifrance.fr, www.pifrance.fr, uk@pi.ws, www.physikinstrumente.co.uk, info@pionline.it, www.pionline.it, info@piceramic.de, www.piceramic.de,
www.publitas.com, www.publitas.nl
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