pi2009
Piezo Nano Positioning
Nanometrology
3-2
©
Physik
Instrumente
(PI)
GmbH
&
Co.
KG
2008.
Subject
to
change
without
notice.
Cat120E
Inspirations2009
08/10.18
Piezo Nano Positioning
Selection Guide: Nanometrology Sensors & Electronics
Models Description Measurement Sensor Page
Range [µm]* Type
Single and Dual Probe Capacitive Nanometrology Position Sensors
D-510 PISeca Single-Electrode Capacitive 20-500 Single-electrode, capacitive 3-8
Sensors for Sub-Nanometer Precision Measurements
D-015, D-050, Sub-Nanometer-Resolution Capacitive Position Sensors to 1000 Integrated Linearization System (ILS) 3-14
D-100
Capacitive Sensor Overview
PI provides dual-plate and sin-
gle-plate capacitive sensors for
ultra-high precision position-
sensing applications. The sen-
sors and special control elec-
tronics with PI's proprietary ILS
circuitry were developed to pro-
vide the highest linearity and
resolution and have also been
employed in PI's reference class
nanopositioning stages for many
years.
Models Description Channels Sensor Page
Type
E-852 PISeca Signal Conditioner Electronics 1 Single-electrode, capacitive 3-10
for Single-Electrode Capacitive Sensors
E-509 Servo Controller card for PISeca 1,3 Dual and single-electrode, capacitive 3-12
1-Plate and Dual-Plate Capacitive Sensors 3-16
D-510 PIseca single-plate
nanometrology sensors
D-015, D-050, D-100
dual-plate capacitive
position sensors
Customized capacitive
sensor electronics
E-852 Signal conditioner
electronics for single plate
sensors
E-509 Servo controller
card for single & dual plate
sensors
Background Information on
capacitive sensors, p. 3-17 ff
Nanometrology Fundamentals
www.pionline.it, www.pifrance.fr, www.pi-china.cn, www.goa-tech.co.il, www.alt.nl, www.bfioptilas.es, www.pi.ws, www.piceramic.de, www.pi-usa.us, www.pi-usa.us, www.pi-japan.jp, www.pi-japan.jp, www.physikinstrumente.co.uk, www.dyneos.ch, www.parameter.se, dms@deepms.com, www.deepms.com, www.warsash.com.au, www.parameter.se, www.eliovac.com.ar, www.rsdobrasil.com.br, www.woojoohitech.com, www.cairnhill.com, www.tetmakina.com, Seewww.piceramic.com, Seep.1-94ff.andwww.piceramic.com, Seewww.piceramic.com, Seealsowww.piceramic.com, andoscillatingmotione.g.in, info@pi-usa.us, www.pi-usa.us, info@pi-usa.us, www.pi-usa.us, info@pi-japan.jp, www.pi-japan.jp, info@pi-japan.jp, www.pi-japan.jp, info@pi-china.cn, www.pi-china.cn, info@pifrance.fr, www.pifrance.fr, uk@pi.ws, www.physikinstrumente.co.uk, info@pionline.it, www.pionline.it, info@piceramic.de, www.piceramic.de,
www.publitas.com, www.publitas.nl
pi2009 main
