pi2009
2-158
Piezo Nano Positioning
The E-470 series high-power
piezo amplifiers/controllers are
specifically designed to drive
high-capacitance PICA PZT
actuators. They are based on
the E-421 four-quadrant ampli-
fier module, which can output
and sink a peak current of
500 mA and an average current
of 100 mA in a voltage range of
3 to 1100 V (jumper selectable
bipolar range also provided).
3 standard configurations are
available:
L52159 E-470.20 is a bench-top am-
plifier in a 9.5'' chassis for
open-loop operation (1 chan-
nel)
L52159 E-471.20 is the amplifier
module in a 19'' rackmount
chassis that can hold addition-
al servo-control, interface
and display modules
L52159 E-472.20 is a 2-channel ver-
sion in a 19'' rackmount chas-
sis for dynamic open-loop
operation
These amplifiers can be used
to drive open and closed-loop
piezo positioning systems.
Open Loop Piezo Operation
For open-loop piezo operation
the amplifier output voltage is
determined by the analog sig-
nal at the Control Input com-
bined with the DC-offset poten-
tiometer setting. Open-loop
operation is ideal for applica-
tions where the fastest re-
sponse and the highest band-
width are essential. Here, com-
manding and reading the tar-
get position in absolute values
is either not important or car-
ried out by an external feed-
back loop.
Optional Servo Controller
Upgrade
The E-471.20 version allows
easy installation of an optional
E-509 sensor- / servo-controller
module for closed-loop piezo
position control. In this mode
the amplifier is slaved to the
E-509 servo controller. Depend-
ing on the attached piezo
mechanics and feedback sen-
sor, positioning accuracy and
repeatability in the nanometer
range and below are feasible.
Computer Control
The E-517 computer inter-
face/display module can also
be installed in the E-471 / E-472.
Optionally digital control via a
D/A converter is possible. For
several D/A boards from Na-
tional Instruments PI offers
a corresponding LabVIEW
driver set which is compatible
with the PI General Command
Set (GCS), the command set
used by all PI controllers. A fur-
ther option includes the patent-
E-470 E-472 / E-421 PICA Piezo Controller
Modular High-Power Amplifier/Controller
Ordering Information
E-470.20
HVPZT Piezo Amplifier, 550 W,
1100 V, Bench-Top
E-471.20
HVPZT Piezo Amplifier, Controller &
Interface / Display Upgrade possi-
ble, 550 W, 1100 V, Bench-Top, 19''
E-472.20
HVPZT Piezo Amplifier, 2 Channels,
550 W, 1100 V, Bench-Top, 19''
E-421.00
HVPZT Piezo Amplifier Module,
550 W, 1100 V, IntegratedP/S
Upgrades for E-471.20
Sensor / Position Servo-Control
Modules
E-509.C1A
Sensor / Servo-Controller Module,
Capacitive Sensor
E-509.S1
Sensor / Servo-Controller Module,
SGS - Sensor
Computer Interface & Display
Modules
E-517.i1
Interface- / Display Module,
24 Bit D/A, TCP/IP, USB, RS-232,
1 Channel
E-515.01
Display Module for PZT Voltage
and Position
E-500.ACD
CD with Driver Set for Analog
Controllers
E-500.HCD
Hyperbit Functionality for
Enhanced System Resolution
Supports certain D/A boards.
Extension cables, adapters &
connectors: see in Accessories
in the Piezo Drivers / Servo
Controllers (page 2-168 ff ).
Ask about custom designs!
L52159 Peak Power 550 W
L52159 Output Voltage 3 to 1100 V or Bipolar
L52159 Optional Position Servo-Control Modules
L52159 Optional 20-Bit Computer Interface Module & Display
L52159 Precision DC-Offset Potentiometer for Input-Signal Bias &
Manual Control
E-471 Configuration example: E-471.20 HVPZT amplifier, with optional
E-509 PZT servo-controller and E-516 20-bit DAC interface/display
E-421, E-470, E-471, E-472: operating limits with various PZT loads,
capacitance is measured in nanofarads
©
Physik
Instrumente
(PI)
GmbH
&
Co.
KG
2008.
Subject
to
change
without
notice.
All
data
are
superseded
by
any
new
release.
The
newest
release
for
data
sheets
is
available
for
download
at
www
.pi.ws.
Cat120E
Inspirations2009
08/10.18
2-159
Piezo Nano Positioning
Piezo Flexure Stages /
High-Speed Scanning Systems
Nanopositioning / Piezoelectrics
Linear Actuators & Motors
Fast Steering Mirrors /
Active Optics
Piezo Drivers /
Servo Controllers
Piezoelectrics in Positioning
Nanometrology
Micropositioning
Linear
Vertical & Tip/Tilt
2- and 3-Axis
6-Axis
Single-Channel
Multi-Channel
Modular
Accessories
Index
Technical Data
Model E-470.20, E-471.20, E-472.20, E-421.00
Function Power amplifier for PICA
TM
high-voltage PZTs
(servo-controller option for E-471)
Amplifier
Output voltage 3 to +1100 V (default)
(Selectable
-260 to +780 V
-550 to +550 V
+260 to -780 V
-3 to -1100 V)
Amplifier channels 1 (E-472: 2)
Average output power 110 W
Peak output power, <5 ms 550 W
Average current 100 mA
Peak current, <5 ms 500 mA
Amplifier bandwidth, small signal DC to 3 kHz, related to load capacitance,
see operating limits graph
Amplifier bandwidth, large signal DC to 3 kHz, related to load capacitance,
see operating limits graph
Ripple, noise <25 mV
RMS
0 to 100 kHz 100 mV
P-P
(200 nF)
Current limitation Short-circuit-proof
Voltage gain +100 ±1, -100 ±1 (selectable)
Control input voltage Servo off: ±1/100 of selected output range
Servo on: 0 to 10 V
Input impedance 100 k?
Interfaces and operation
PZT voltage output LEMO EGG.0B.701.CJL1173
Control input BNC
DC Offset 10-turn pot., adds 0 to +10 V to Control IN
Miscellaneous
Operating voltage 100-120 or 220-240 VAC, selectable
(fuse change required)
Operating temperature range +5 to +50 °C (over 40 °C, max. av.)
power derated 10 %
Mass 5.2 kg (E-470); 7.6 kg (E-471); 10.1 kg (E-472); 2.5 kg (E-420)
Dimensions 236 x 132 x 296 mm + handles (E-470)
450 x 132 x 296 mm + handles (E-471, E-472)
215 x 123 x 185 mm (E-420)
E-421.00 HVPZT piezo amplifier module
ed HyperBit technology pro-
viding enhanced system reso-
lution.
Please read details on
Calibration Information (see
p. 2-103).
www.pionline.it, www.pifrance.fr, www.pi-china.cn, www.goa-tech.co.il, www.alt.nl, www.bfioptilas.es, www.pi.ws, www.piceramic.de, www.pi-usa.us, www.pi-usa.us, www.pi-japan.jp, www.pi-japan.jp, www.physikinstrumente.co.uk, www.dyneos.ch, www.parameter.se, dms@deepms.com, www.deepms.com, www.warsash.com.au, www.parameter.se, www.eliovac.com.ar, www.rsdobrasil.com.br, www.woojoohitech.com, www.cairnhill.com, www.tetmakina.com, Seewww.piceramic.com, Seep.1-94ff.andwww.piceramic.com, Seewww.piceramic.com, Seealsowww.piceramic.com, andoscillatingmotione.g.in, info@pi-usa.us, www.pi-usa.us, info@pi-usa.us, www.pi-usa.us, info@pi-japan.jp, www.pi-japan.jp, info@pi-japan.jp, www.pi-japan.jp, info@pi-china.cn, www.pi-china.cn, info@pifrance.fr, www.pifrance.fr, uk@pi.ws, www.physikinstrumente.co.uk, info@pionline.it, www.pionline.it, info@piceramic.de, www.piceramic.de,
www.publitas.com, www.publitas.nl
pi2009 main
