pi2009
A-25
Piezo Nano Positioning
Precision Machining (Metal, Optics, Laser Cutting, Diamond Turning)
Applications
PI introduced the first line of
piezoelectric actuators more
than 35 years ago. The technol-
ogy's unique features such as:
responsiveness; stiffness; life
time and infinite resolution,
have opened many markets
since then, from semiconduc-
tor testing to precision machin-
ing. Typical piezoelectric fast
tool servos for precision
machining are equipped with
special waterproof casings
which also provide the
mechanical interface to the
tooling machine and the tool
servo.
Integrated metrology systems
feature resolution in the nano-
meter and sub-nanometer
range for closed-loop opera-
tion with digital or analog
motion controllers. Flexure
guiding mechanisms and
motion amplifiers provide long
traveling ranges and protect
the piezo ceramics from off-
axis forces.
PI piezo actuator systems are
used throughout the world,
often in applications that run
24 hours a day, seven days a
week. They improve the manu-
facturing precision of optics,
crank shafts, bearings, cylin-
ders, pistons, etc. in crucial
processes such as diamond
turning, milling, grinding, out-
of-round boring or wear-com-
pensation of tools.
Custom-manufactured high-
performance piezoceramic actu-
ators provide lifetimes of bil-
lions of cycles. Power amplifiers
with energy recovery and
2000 W peak power are avail-
able for high-dynamics applica-
tions.
Application PI Solution Typical PI Products*
P-225 Preloaded High Force Piezo Actuators, p. 1-78
Fast Piezo Driven Tool Servos, ask PI info@pi.ws
Heavy-Duty Piezo Actuators and
Amplifiers, Custom Piezoelectric
Fast Tool Servos
Precision Piezo Stages for Grinding
Piezo Actuators for Fast Tool Tip Control
Non-Circular Turning
Boring
Grinding
Polishing of Optics, Bearings, Pistons,
Shafts...
Aspheric Optics Manufacturing
(Contact Lenses)
Diamond Turning
Piezo Actuators and Amplifiers
Piezo Stage Nano-Positioners
Custom Piezo Stages
P-212, P-216 PICA Power PIezo Stack Actuators, p. 1-78
P-750 Piezo Nanopositioning System, p. 2-24
P-625 PIHera
®
Piezo Linear Stage, p. 2-22
M-238 High-Load Linear Actuator, p. 1-52
Focus/Beam Control for Laser
Welding/Cutting
Piezo Actuators
Piezo Steering Mirrors / Optics
Custom High-Speed Actuators
S-334 Miniature Piezo Tip/Tilt-Mirror, p. 2-90
S-330 Piezo Tip/Tilt-Platform, p. 2-88
P-842 · P-845 Preloaded Piezo Actuators, p. 1-76
P-885 PICMA
®
Multilayer Piezo Stack Actuators, p. 1-82
Active Vibration Control
Heavy-Duty Piezo
Actuators and ControllerFs
Custom Stages
P-885 PICMA
®
Multilayer Piezo Stack Actuators, p. 1-82
P-056 PICA Stack Actuator, p. 1-88
P-212 Preloaded PICA Power Piezo Actuators, p. 1-78
P-876 DuraAct Piezo Patch Transducers, p. 1-96
*Other standard or custom solutions from PI could be even more suitable for your application. Talk to a PI Applications Engineer or visit www.pi.ws.
A-26
©
Physik
Instrumente
(PI)
GmbH
&
Co.
KG
2008.
Subject
to
change
without
notice.
Cat120E
Inspirations2009
08/10.18
Piezo Nano Positioning
Application PI Solution Typical PI Products*
P-752 High-Precision Nanopositioning Stage, p. 2-18
P-772 Miniature Nanopositioning System, p. 2-24
P-628 PIHera
®
Piezo Linear Stage, p. 2-74
High-Level Dynamics
Nanopositioning Stages
Ultra-Fast Nanoautomation
®
Controller
Read/Write Head Testing
High-Speed Tracking
Track Following Servos
Digital Controllers with Optional
InputShaping
®
Technology
E-712 Modular Digital Piezo Controller, p. 2-14
E-753 Digital Piezo Controller, p. 2-16
Nanomagnetic Testing
Thermal Annealing
Multi-Axis Nanopositioning Systems
P-733.2DD XY(Z) Piezo-Nanopositioning Stage, p. 2-62
P-563 PIMars XYZ Piezo System, p. 2-72
P-587 6-Axis Precision Piezo Stage, p. 2-76
Laser Beam Focusing /
AlignmentBeam Stabilization (DVD
Mastering)
PIFOC
®
Nanofocusing Systems
PIHera Nanopositioning Stages
Active optics
Fast Voice-Coil Drives
P-725 PIFOC
®
Long-Travel Objective Scanner, p. 2-28
P-628 PIHera
®
Piezo Linear Stage, p. 2-74
S-334 Long Range Steering Mirror p. 2-90
V-106 QuickScan High-Dynamics Scanner, p. 4-48
*Other standard or custom solutions from PI could be even more suitable for your application. Talk to a PI Applications Engineer or visit www.pi.ws.
Data Storage Technology
Applications
Piezo positioning systems are
fundamental tools for test &
metrology systems in ultra-
high-density data storage
applications, nanoimprint, na-
noassembly, and nanofabrica-
tion. Their extreme precision
and speed makes them vital
components in the quest to
follow Moore's law.
PI has taken nanopositioning
to the next level by combining
advanced mechanical designs
and high-throughput control
technology to provide nano-
meter precision in millisec-
onds. This is called NanoAuto-
mation
®
.
www.pionline.it, www.pifrance.fr, www.pi-china.cn, www.goa-tech.co.il, www.alt.nl, www.bfioptilas.es, www.pi.ws, www.piceramic.de, www.pi-usa.us, www.pi-usa.us, www.pi-japan.jp, www.pi-japan.jp, www.physikinstrumente.co.uk, www.dyneos.ch, www.parameter.se, dms@deepms.com, www.deepms.com, www.warsash.com.au, www.parameter.se, www.eliovac.com.ar, www.rsdobrasil.com.br, www.woojoohitech.com, www.cairnhill.com, www.tetmakina.com, Seewww.piceramic.com, Seep.1-94ff.andwww.piceramic.com, Seewww.piceramic.com, Seealsowww.piceramic.com, andoscillatingmotione.g.in, info@pi-usa.us, www.pi-usa.us, info@pi-usa.us, www.pi-usa.us, info@pi-japan.jp, www.pi-japan.jp, info@pi-japan.jp, www.pi-japan.jp, info@pi-china.cn, www.pi-china.cn, info@pifrance.fr, www.pifrance.fr, uk@pi.ws, www.physikinstrumente.co.uk, info@pionline.it, www.pionline.it, info@piceramic.de, www.piceramic.de,
www.publitas.com, www.publitas.nl
pi2009 main
