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© Physik Instrumente (PI) GmbH & Co. KG 2008. Subject to change without notice. All data are superseded by any new release. The newest release for data sheets is available for download at www .pi.ws. Cat120E Inspirations2009 08/10.18 Piezo • Nano • Positioning Technical Data Models E-760.3SV E-760.3Si Units Function Piezo controller card Piezo controller card for P-611 NanoCube ® systems for P-611 NanoCube ® systems Axes 3 3 Sensor Servo characteristics P-I (analog), notch filter P-I (analog), notch filter Sensor type SGS SGS Sensor channels 3 3 Amplifier Input voltage -2 to +12 V -2 to +12 V Output voltage -20 to 120 V -20 to 120 V Amplifier channels 3 3 Peak output power per channel 9 9 W Average output power per channel 1 1 W Peak current per channel, <5 ms 90 90 mA Average current per channel, >5 ms 8 8 mA Current limitation Short-circuit-proof Short-circuit-proof Voltage gain 10 ±0.1 10 ±0.1 Interfaces and operation Communication interfaces Standard computer bus (ISA); Standard computer bus (ISA); FC-connector FC-connector Piezo / sensor connector 25-pin sub-D connector 25-pin sub-D connector Analog input 8-pin connector (piezo); 8-pin connector (piezo); FC connector (optical metrology) FC connector (optical metrology) Supported functionality Visible-range detector Infrared-range detector Ordering Information E-760.3SV NanoCube ® Piezo Controller, Board for C-880 and F-206 Controller Systems, Photodetector (Visual Range) E-760.3Si NanoCube ® Piezo Controller, Board for C-880 and F-206 Controller Systems, Photodetector (Infrared Range) For C-880 Automation Controller and F-206 Hexapod Precision Alignment System E-760 NanoCube ® Piezo Controller Card The E-760 is a piezo amplifier and position servo-controller card that was especially de- signed for the P-611 Nano- Cube ® (see p. 2-50) XYZ nanopositioning system oper- ated together with the F-206, M-824, M-840 or M-850 (see p. 4-6 ff ). In addition to three low- noise amplifiers and position servo-controller circuits, it is equipped with optical metrolo- gy and I/O for automatic align- ment of photonics compo- nents. All functions are accessi- ble via the computer-bus inter- face. In addition, there is an analog input for position con- trol and an FC connector for the optical metrology. Thus, positioning accuracy and repeatability down to the sub- nanometer range is possible. E-760 controller card with P-611.3SF NanoCube ® XYZ nanopositioning system L52159 3 x 9 W Peak Power L52159 Position Servo-Control L52159 For P-611 NanoCube ® and F-206 HexAlign™ 6-DOF Alignment Systems L52159 Built-in Optical Metrology for Automated Alignment 2-138

2-139 Piezo • Nano • Positioning The E-464 is a bench-top piezo driver/amplifier for PICA TM high- voltage PZTs. Its three low- noise, 4-quadrant amplifiers provide a gain of 100 and can output and sink a peak current of 25 mA and an average cur- rent of >3 mA each. If only 1 channel is operated, an ave- rage output power of 12 W can be achieved. Three 3 1 / 2 -digit LED displays show the output voltage of each individual channel. Analog Control E-464 amplifiers are designed to provide precise control of open-loop piezo positioning systems. The amplifier output voltage is determined by the analog signal at the Control Input combined with the DC-offset potentiometer set- ting. Computer Control Optionally digital control via a D/A converter is possible. For several D/A boards from Natio- nal Instruments PI offers a cor- responding LabVIEW™ driver set which is compatible with the PI General Command Set (GCS), the command set used by all PI controllers. A further option includes the patented HyperBit™ technology provid- ing enhanced system resolu- tion. Technical Data Model E-464.00 Function Power amplifier for PICA TM high-voltage PZTs Amplifier Output voltage 0 to +1100 V Amplifier channels 3 Average output power per channel >3.5 W (up to 12 W if 1 channel is operated) Peak output power per channel, <5 ms 25 W Average current per channel >3.5 mA (up to 12 mA if 1 channel is operated) Peak current per channel, <5 ms 25 mA Amplifier bandwidth, small signal 1 kHz Amplifier bandwidth, large signal 3.5 Hz (660 nF); 35 Hz (70 nF) Ripple, noise 5 mV RMS 0to100kHz 50mV P-P (100 nF) Current limitation Short-circuit-proof Voltage gain +100 ±1 Control input voltage 0 to 11 V Input impedance 100 k? Interface and operation PZT voltage output socket 3 x LEMO EGG.0B.701.CJL1173 Control input socket 3 x BNC DC Offset 3 x 10-turn pot, adds 0 to +10 V to Control IN Display 3 x 3 1 / 2 -digit LED display for output voltages Miscellaneous Operating voltage 100 to 120 or 220 to 240 VAC, selectable (fuse change required) Operating temperature range +5 to +50 °C (over 40 °C, max. av. power derated 10 %) Mass 4.3 kg Dimensions 236 x 88 x 273 mm + handles E-464 PICA™ Piezo Driver / Amplifier L52159 3 Powerful Channels L52159 Peak Power3x25W L52159 Output Voltage Range 0 to 1100 V L52159 3 LED Voltage Displays L52159 Precision DC-Offset Potentiometers for Input-Signal Bias & Manual Control E-464.00 3-channel HVPZT amplifier For Piezo Systems and Actuators, for up to 3 Axes Ordering Information E-464.00 HVPZT Piezo Amplifier, 3 Channels, 1100 V, Bench-Top E-500.ACD CD with Driver Set for Analog Controllers E-500.HCD HyperBit™ Functionality for Enhanced System Resolution Supports certain D/A boards Extension cables, adapters & connectors: see in “Accessories” (p. 2-168 ff ) Ask about custom designs! E-464: operating limits with various PZT loads, capacitance is measured in nanofarads © Physik Instrumente (PI) GmbH & Co. KG 2008. Subject to change without notice. All data are superseded by any new release. The newest release for data sheets is available for download at www .pi.ws. Cat120E Inspirations2009 08/10.18

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