pi2009
A-23
Piezo Nano Positioning
Nanotechnology, Nanofabrication, NanoAutomation
®
Applications
Piezo positioning systems are
fundamental tools for nano-
technology applications. Their
extreme precision and speed
makes them vital components
in applications such as nano-
imprint, nanoassembly, ultra-
high density data storage and
nanofabrication.
In addition to extremely fast
mechanics, PI also designs
advanced digital piezo con-
trollers that provide very high
bandwidth and eliminate
dynamic nonlinearity for vastly
improved tracking accuracy.
Active trajectory control elimi-
nates off-axis errors and
InputShaping
®
cancels self-
generated vibration, for the
fastest possible settling
speeds.
The combination of advanced
mechanical design and high-
throughput control technology
is called NanoAutomation
®
.
Application PI Solution Typical PI Products*
P-733.3DD XY(Z) Piezo-Nanopositioning Stage, p. 2-62
P-587 6-Axis Precision Piezo Stage, p. 2-76
P-620.1 - P-629.1 PIHera
®
Piezo Linear Stage, p. 2-22
P-840 Preloaded Piezo Actuators, p. 1-74
N-380 PiezoWalk
®
Nanopositioning Linear Motor Actuator, p. 1-14
Multi-Axis Nanopositioning Systems
PIHera
®
Stages Scanner
Preloaded Piezo Actuators
PiezoWalk
®
Nanopositioning Drives
Nanoimprint, Nanoassembly
Nanofabrication, Nanojoining
Nanomechanics
Nanomaterials Testing
Ultra-Precision Linear Motors
& Actuators
Motorized Precision Linear Actuators
PiezoWalk
®
Linear Motor Actuators,
Ultrasonic Ceramic High-Speed Motors
N-310 NEXACT
®
OEM Miniature Linear Motor/Actuator, p. 1-12
P-653 Sub-Miniature Piezo Ceramic Linear Motor p. 1-32
M-674 PILine
®
RodDrive Piezo Linear Drive, p. 1-30
M-230 Servo Motor Actuator, p. 1-46
P-661 Ultrasonic Linear Motor for OEMs, p. 1-28
Nanodosing
Microdispensing
Nanoliter Control
Fast Valve Control
Tube Actuators
Disk Actuators
Lever Amplified Actuators
Bender Actuators
Piezoelectric Components
PT120 Piezo Tubes, p. 1-100
P-601 PiezoMove Z-Actuator, p. 1-68
PL112 · PL140 PICMA
®
Bender Actuators, p. 1-94
See www.piceramic.com
Microassembly and Handling Systems Hexapod 6D Micropositioning Robots
M-840 HexaLight 6-Axis Positioning System, p. 4-8
M-824 Compact 6-Axis-Positioning System, p. 4-10
M-850 Hexapod 6-Axis Positioning System, p. 4-6
F-206.S HexAlign 6 Axis-Hexapod, p. 4-12
Precision Positioning of Components
(Linear and Rotation)
M-110 Compact Micro-Translation Stage, p. 4-22
M-663 PILine
®
Linear Motor Stage, p. 4-28
M-511.HD Hybrid Ultra-Precision, Micropositioning
Stage, p. 4-46
M-060 · M-061 · M-062 Precision Rotation Stage, p. 4-76
Miniature Stages
Rotation Stages
N-380 PiezoWalk
®
Nanopositioning Linear Motor Actuator, p. 1-14
M-230 Precision Linear Actuator, p. 1-46
M-235 Heavy-Duty Precision Linear Actuator, p. 1-50
P-661 PILine
®
Piezo Linear Drive, p. 1-28
M-674 PILine
®
RodDrive Piezo Linear Drive, p. 1-30
Precision Actuation
Motorized Precision Linear Actuators
PiezoWalk
®
Linear Motor Drives and
Actuators
Microgrippers
Manipulators
Microembossing
Piezo Bender Actuators
PiezoWalk
®
Drives
PILine
®
Drives
Heavy-Duty Piezo Translators
PL112 · PL140 PICMA
®
Bender Actuators, p. 1-94
P-885 PICMA
®
Multilayer Piezo Stack Actuators, p. 1-82
P-653 PILine
®
Miniature Linear Motor / Slide, p. 1-32
N-310 NEXACT
®
OEM Miniature Linear Motor/Actuator, p. 1-12
P-225 PICA Power PIezo Stack Actuators, p. 1-80
P-007 PICA Stack Actuator p. 1-86
*Other standard or custom solutions from PI could be even more suitable for your application. Talk to a PI Applications Engineer or visit www.pi.ws.
A-24
©
Physik
Instrumente
(PI)
GmbH
&
Co.
KG
2008.
Subject
to
change
without
notice.
Cat120E
Inspirations2009
08/10.18
Piezo Nano Positioning
Photonics, Telecommunications, Integrated Optics
Applications
Application PI Solution Typical PI Products*
P-653 Sub-Miniature Piezo Ceramic Linear Motor for Micro
Lens Positioning / Cell Phone Autofocus & Zoom p. 1-32
P-725 PIFOC
®
Piezo Nanofocussing Device, p. 2-28
P-661 High Speed Piezo Ceramic Linear Motor
for OEMs, p. 1-28
PIFOC
®
Piezo Z-Scanners
High Speed Piezo Ceramic Linear
Motors
Autofocusing
Nanophotonics
Laser Deposition
Quantum Computing
Multi-Axis Nanopositioning Systems
Hexapod 6D Systems
P-587 6-Axis Precision Piezo Stage, p. 2-76
P-563 PIMars XYZ Piezo System, p. 2-72
P-615 NanoCube
®
XYZ Piezo System, p. 2-68
M-824 Compact 6-Axis-Positioning System, p. 4-10
Photonics Packaging
MEMS Positioning/Alignment
Fiber Alignment
Fiber Optic Test Systems
6D Hexapod Alignment Systems,
Ultra-Compact, X, XY and / XYZ Translation
Stages with Piezo Option
3D Piezo-Driven Nanopositioning Systems
Fast Voice-Coil Scanners/Positioners
F-206.S HexAlign 6 Axis-Hexapod, p. 4-12
M-110 Compact Micro-Translation Stage, p. 4-22
M-105.3P Linear Slide, p. 4-50
F-130 Compact XYZ Fiber Aligner, p. 4-66
P-611 Piezo Nanopositioner, p. 2-20
V-106 QuickScan High-Dynamics Scanner, p. 4-48
Fiber Splicer, Fiber Alignment,
Fiber Optic Switches
Piezo Bender Actuators
Piezo Actuators for Positioning Tasks
Miniature PZT Actuators
P-810 Piezo Actuators, p. 4-14
PL112 · PL140 PICMA
®
Bender Actuators, p. 1-94
Fiber Stretching/Modulation PT120 PT Piezo Tube Actuators, p. 1-100
Tube Actuators for Fiber Stretching,
Compressing, Modulating
PI offers a great variety of inno-
vative solutions for testing
and fabrication of MEMs and
photonics devices. Products
range from automated 6D align-
ment systems for industrial
automation to simple devices
for laboratory test setups. Piezo
drives make possible rapid
scanning with sub-millisecond
response.
Applications include automated
photonic alignment of collimat-
ed fibers or arrays, test systems
for MEMS and multi-channel
waveguides. Miniature piezo
linear motors provide high
speed with very low power con-
sumption, ideal in cell phone
autofocussing applications.
The following table includes but
a few examples of the system
solutions that PI has developed
for the photonics market.
Translation Stages
Rotation Stages
Fiber Optic Alignment
Laser Beam Switching
Optical Switches
Free Space Communications
Fast Tip/Tilt Mirrors for Optical
Beam Switching
Fabry-Perot Filters
Laser Tuning
Optics Nanopositioning Systems
Special Piezoceramics
Miniature PZT Actuators
Writing Fiber Bragg Gratings
Piezo Nanoscanning Stages
Piezo Actuators
*Other standard or custom solutions from PI could be even more suitable for your application. Talk to a PI Applications Engineer or visit www.pi.ws.
F-130 Miniature XYZ Alignment System, p. 4-66
M-122 High Precision Miniature Translation Stage , p. 4-24
M-037 Compact Precision Rotation Stage, p. 4-78
M-126 High-Resolution Translation Stage, p. 4-38
M-235 Heavy-Duty Precision Linear Actuator, p. 1-50
S-334 Miniature Piezo Tip/Tilt-Mirror, p. 2-90
S-330 Piezo Tip/Tilt-Platform, p. 2-88
PL022 PICMA
®
Bender Actuators, p. 1-92
S-316 PiezoZ/Tip/TiltScanner,p.2-94
See also www.piceramic.com
P-753 LISA Linear Actuator & Stage, p. 2-16
P-752 High Precision Nanopositioning Stage, p. 2-18
P-885 PICMA
®
Multilayer Piezo Stack Actuators, p. 1-82
www.pionline.it, www.pifrance.fr, www.pi-china.cn, www.goa-tech.co.il, www.alt.nl, www.bfioptilas.es, www.pi.ws, www.piceramic.de, www.pi-usa.us, www.pi-usa.us, www.pi-japan.jp, www.pi-japan.jp, www.physikinstrumente.co.uk, www.dyneos.ch, www.parameter.se, dms@deepms.com, www.deepms.com, www.warsash.com.au, www.parameter.se, www.eliovac.com.ar, www.rsdobrasil.com.br, www.woojoohitech.com, www.cairnhill.com, www.tetmakina.com, Seewww.piceramic.com, Seep.1-94ff.andwww.piceramic.com, Seewww.piceramic.com, Seealsowww.piceramic.com, andoscillatingmotione.g.in, info@pi-usa.us, www.pi-usa.us, info@pi-usa.us, www.pi-usa.us, info@pi-japan.jp, www.pi-japan.jp, info@pi-japan.jp, www.pi-japan.jp, info@pi-china.cn, www.pi-china.cn, info@pifrance.fr, www.pifrance.fr, uk@pi.ws, www.physikinstrumente.co.uk, info@pionline.it, www.pionline.it, info@piceramic.de, www.piceramic.de,
www.publitas.com, www.publitas.nl
pi2009 main
