pi2009
A-21
Piezo Nano Positioning
M-037 Compact Precision Rotation Stage, p. 4-78
M-038 Precision Rotation Stage, p. 4-80
M-060 Precision Rotation Stage, p. 4-76
Grating Rotation Rotation Stages
Application PI Solution Typical PI Products*
Handling
Compact Drive Units
Non-Magnetic Actuators
Piezo Linear Drives
PiezoWalk
®
Piezo Actuators
P-653 Sub-Miniature Linear Motor, p. 1-32
M-664 PILine
®
Linear Motor Stage, p. 4-30
N-310 NEXACT
®
OEM Linear Motor, p. 1-12
Nanodosing
Ultrasonic Oscillations
Nanoliter Pumps
Piezoceramic Components,
Flexure-Guided Actuators
P-601 PiezoMove Z-Actuator, p. 1-68
See p. 1-94 ff. and www.piceramic.com
Force and Motion Sensors See p. 1-94 ff and www.piceramic.comPiezoceramic Components
P-601 PiezoMove Z-Actuator, p. 1-68
P-611 Piezo Nanopositioner, p. 2-50 ff
P-725 PIFOC
®
Piezo Flexure Objective Scanners, p. 2-28 ff
N-310 NEXACT
®
OEM Miniature Linear Motor, p. 1-12
N-380 PiezoWalk
®
Nanopositioning Linear Actuator, p. 1-14
OCT, WLI
Diagnostics,
Dermatology
Ophthalmology
Piezo Actuators
Piezo Linear Motor Drives
PiezoWalk
®
Drives and Actuators
Confocal Microscopy
Focusing
Z-Stack Image Acquistion
Z-Stages
Objective Z-Scanners
Optical Trapping
Cell Tracking
Optical Tweezers
Molecular Stretching
Piezo Nanopositioning and
Scanning Stages
*Other standard or custom solutions from PI could be even more suitable for your application. Talk to a PI Applications Engineer or visit www.pi.ws.
P-541 Piezo XY-Stage, p. 2-60
P-527 Multi-Axis Piezo Scanner, p. 2-70
P-733 XY(Z) Piezo-Nanopositioning Stage, p. 2-62
P-363 PicoCube XY(Z) Piezo Scanner, p. 2-66
P-541.Z Piezo Z and Z/Tip/Tilt Stages, p. 2-44
P-721, P-725, P-726 PIFOC
®
Piezo Flexure Objective Scanners, p. 2-26 ff
P-737 PIFOC
®
Specimen-Focusing Z Stage, p. 2-34
A-22
©
Physik
Instrumente
(PI)
GmbH
&
Co.
KG
2008.
Subject
to
change
without
notice.
Cat120E
Inspirations2009
08/10.18
Piezo Nano Positioning
Metrology / Laser Systems / Optical Inspection / Tribology
Applications
Application PI Solution Typical PI Products*
P-721 PIFOC
®
Piezo Flexure Objective Scanner, p. 2-26
P-587 6-Axis Precision Piezo Stage, p. 2-76
P-734 Low Bow XY Scanning Stage, p. 2-64
S-303 Piezo Phase Shifter, p. 2-96
P-622.Z PIHera
®
Precision Z-Stage, p. 2-40
PIFOC
®
Objective Nanofocusing
Systems
Piezo Scanning Stages
Z-Axis Piezo Phase Shifters
Scanning Interferometry
White-Light Interferometry
Precision Linear Positioning Stages for
Surface Analysis, Optical Inspection,
Laser Positioning Systems
Microscopy Stages with Piezo Option
Hybrid Long-Range Nanopositioning
Stages
Long Travel Piezo Flexure Stages
M-714 Nanometer-Precision Hybrid Linear Stage, p. 4-62
M-511 Heavy-Duty Micropositioning Stage, p. 4-44
M-014 Linear Slide with Aperture, p. 4-54
P-629 Flexure Stage with 1.8 mm Travel, p. 2-22
Long Range Surface Scanning Voice-Coil Scanning Stages/Positioners V-106 QuickScan High-Dynamics Scanner, p. 4-48
Nanomaterials Testing
Nanotribology
Nanothickness
Measurements
Nanoindentation
Contacting Surface Profilometer
Piezo Actuators
X, XY and XYZ Piezo Stages
Capacitive
Sensors
Piezo Motor Stages
D-015 · D-050 · D-100 Capacitive Sensors, p. 3-14
P-840 Preloaded Piezo Actuators, p. 1-74
P-734 XY Piezo Scanner, p. 2-64
P-753 LISA Linear Actuator & Stage, p. 2-16
M-663 Ultrasonic Piezo Linear Motor Stage, p. 4-28
*Other standard or custom solutions from PI could be even more suitable for your application. Talk to a PI Applications Engineer or visit www.pi.ws.
PI precision positioning stages
and actuators have been used
in many noncontacting optical
inspection and contacting
nanometrology applications.
They provide sub-nanometer
precision and extremely uni-
form motion with flatness and
straightness in the nanometer
and sub-nanometer range for
the latest technology break-
throughs. Sophisticated digital
control algorithms can
improve scanning linearity by
several orders of magnitude
while reducing runout errors to
subatomic tolerances. PI's
capacitive nanometrology sen-
sors measure motion down to
the sub-nanometer range with
very high bandwidth.
PI piezo-driven actuators and
nanopositioning sensors are
also ideal components for the
design of nano-indentation /
micro-indentation mechanisms
and nanotribology / nanofric-
tion experiments
www.pionline.it, www.pifrance.fr, www.pi-china.cn, www.goa-tech.co.il, www.alt.nl, www.bfioptilas.es, www.pi.ws, www.piceramic.de, www.pi-usa.us, www.pi-usa.us, www.pi-japan.jp, www.pi-japan.jp, www.physikinstrumente.co.uk, www.dyneos.ch, www.parameter.se, dms@deepms.com, www.deepms.com, www.warsash.com.au, www.parameter.se, www.eliovac.com.ar, www.rsdobrasil.com.br, www.woojoohitech.com, www.cairnhill.com, www.tetmakina.com, Seewww.piceramic.com, Seep.1-94ff.andwww.piceramic.com, Seewww.piceramic.com, Seealsowww.piceramic.com, andoscillatingmotione.g.in, info@pi-usa.us, www.pi-usa.us, info@pi-usa.us, www.pi-usa.us, info@pi-japan.jp, www.pi-japan.jp, info@pi-japan.jp, www.pi-japan.jp, info@pi-china.cn, www.pi-china.cn, info@pifrance.fr, www.pifrance.fr, uk@pi.ws, www.physikinstrumente.co.uk, info@pionline.it, www.pionline.it, info@piceramic.de, www.piceramic.de,
www.publitas.com, www.publitas.nl
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