pi2009
2-98
©
Physik
Instrumente
(PI)
GmbH
&
Co.
KG
2008.
Subject
to
change
without
notice.
Cat120E
Inspirations2009
08/10.18
Piezo Nano Positioning
Drive Properties
Electrical capacitance
The piezo capacitance values in-
dicated in the technical data
tables are small-signal values
(measured at 1 V, 1000 Hz, 20 °C,
no load). Large-signal values at
room temperature are 30 to 50 %
higher. The capacitance of piezo
ceramics changes with ampli-
tude, temperature, and load, up
to 200 % of the unloaded, small-
signal capacitance at room tem-
perature. For detailed informa-
tion on power requirements,
refer to the amplifier frequency-
response graphs in the Piezo
Drivers / Servo Controllers (see
p. 2-99 ff ) section of this catalog.
Dynamic Operating Current
Coefficient (DOCC)
Average electrical current (sup-
plied by the amplifier) required
to drive a piezo actuator per unit
frequency and unit displacement
(sine-wave operation). For exam-
ple, to find out if a selected
amplifier can drive a given piezo
tilt platform at 50 Hz with
300 µrad amplitude, multiply the
DOC coefficient by 50 and 300
and check if the result is less
than or equal to the output cur-
rent of the selected amplifier. For
details see the tutorial Piezo-
electrics in Positioning (see p.
2-195 ff ) section.
Miscellaneous
Operating temperature range
Typically -20 to +80 °C, the tem-
perature range indicates where
the piezo stage may be operated
without damage. Performance
specifications are valid for room
temperature (22 °C) and closed-
loop systems are calibrated for
optimum performance at this
temperature (specifications for
other operating temperatures on
request). Recalibration is recom-
mended for operation at a signif-
icantly higher or lower tempera-
ture. Custom designs for ultra-
low or ultra-high temperatures
on request.
Material
Flexure stages are usually made
of anodized aluminum or stain-
less steel. Small amounts of
other materials may be used
internally (for spring preload,
piezo coupling, mounting, ther-
mal compensation, etc.).
Al: Aluminum
N-S: Non-magnetic stainless
steel
S: Ferromagnetic stainless
steel
I: Invar
T: Titanium
Voltage connection
Standard operating voltage con-
nectors are LEMO and sub-D
type connectors.
LEMO connector: LEMO FFA.
00.250, male. Cable: coaxial, RG
178,Tefloncoated,1m
Sensor connection
Standard sensor connectors are
LEMO and sub-D type connec-
tors.
Sub-D special connectors con-
tain both piezo voltage and sen-
sor connections.
For extension cables and adap-
ters, see Accessories (p.
2-168 ff ), in the Piezo Drivers /
Servo Controllers Section.
Piezo Nano Positioning
Nanopositioning / Piezoelectrics
Piezo Drivers / Servo Controllers
www.pionline.it, www.pifrance.fr, www.pi-china.cn, www.goa-tech.co.il, www.alt.nl, www.bfioptilas.es, www.pi.ws, www.piceramic.de, www.pi-usa.us, www.pi-usa.us, www.pi-japan.jp, www.pi-japan.jp, www.physikinstrumente.co.uk, www.dyneos.ch, www.parameter.se, dms@deepms.com, www.deepms.com, www.warsash.com.au, www.parameter.se, www.eliovac.com.ar, www.rsdobrasil.com.br, www.woojoohitech.com, www.cairnhill.com, www.tetmakina.com, Seewww.piceramic.com, Seep.1-94ff.andwww.piceramic.com, Seewww.piceramic.com, Seealsowww.piceramic.com, andoscillatingmotione.g.in, info@pi-usa.us, www.pi-usa.us, info@pi-usa.us, www.pi-usa.us, info@pi-japan.jp, www.pi-japan.jp, info@pi-japan.jp, www.pi-japan.jp, info@pi-china.cn, www.pi-china.cn, info@pifrance.fr, www.pifrance.fr, uk@pi.ws, www.physikinstrumente.co.uk, info@pionline.it, www.pionline.it, info@piceramic.de, www.piceramic.de,
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