pi2009
2-78
© Physik Instrumente (PI) GmbH & Co. KG 2008. Subject to change without notice. All data are superseded by any new release. The newest release for data sheets is available for download at www
.pi.ws. Cat120E Inspirations2009 08/10.18
Piezo Nano Positioning
Performance specifications are
valid for room temperature
(22 ±3 °C) and closed-loop sys-
tems are calibrated at this tem-
perature (specifications for dif-
ferent operating temperatures
on request). Recalibration is
recommended for operation at
a significantly higher or lower
temperature. Custom designs
for ultra-low or ultra-high
temperatures on request.
Integrated feedback sensor
Absolute measuring capacitive
and SGS sensors are used to pro-
vide position information to the
controller. For details see the tuto-
rial Piezoelectrics in Positioning
section (see p. 2-188 ff ).
Open-loop travel for PICMA
®
Ceramic Equipped Piezo
Stages and Actuators
Typical open-loop travel at 0 to
100 V operating voltage. Max.
recommended operating volt-
age range is -20 to +120 V
(extremes for short durations
only).
Open-loop travel for PICA
Ceramic Equipped Piezo
Actuators
Typical open-loop travel of
high-voltage piezo actuators at
0 to +1000 V operating voltage.
Voltages in excess of +750 V
should not be applied for long
durations. Operation in the
range of -200 to +750 V is rec-
ommended for maximum life-
time and displacement.
Closed-loop travel for PICMA
®
Ceramic Equipped Piezo
Stages and Actuators
Travel provided in closed-loop
operation. PI piezo amplifiers
have an output voltage range
of -20 to +120 V or -30 to +135 V
to provide enough margin for
the servo-controller to compen-
sate for load changes, etc.
Open-loop / closed-loop
resolution
Resolution of piezo flexure
stages is basically infinitesimal
because it is not limited by stic-
tion or friction. Instead of reso-
lution, the noise-equivalent
motion is specified. Values are
typical results (RMS, 1 ?),
measured with E-503/E-508)
amplifier module in E-500/501
chassis.
Full-range repeatability (typ.)
Typical values in closed-loop
mode (RMS, 1 ?). Repeatability
is a percentage of the total dis-
tance or angle traveled. For
small ranges, repeatability is
significantly better.
Pitch / Yaw / Roll / Rotational
Runout
Typical rotational off-axis error;
sometimes associated with a
particular motion axis, as in
Rotational runout (Z motion).
Motion and positioning
Notes on Specifications for Piezo Stages, Systems and Actuators
Stiffness
Static large-signal stiffness of
the stage in operating direction
at room temperature. Small-
signal stiffness and dynamic
stiffness may differ because of
effects caused by the active
nature of piezoelectric material,
compound effects, etc. For
details see the tutorial
Piezoelectrics in Positioning
section (see p. 2-171 ff ).
Unloaded resonant frequency
Lowest resonant frequency in
operating direction (does not
specify the maximum operat-
ing frequency). For details
see the tutorial Piezoelectrics
in Positioning section (see
p. 2-171 ff ).
Resonant frequency with load
Resonant frequency of the
loaded system.
Push/pull force capacity (in
operating direction)
Specifies the maximum forces
that can be applied to the sys-
tem along the active axis.
Limited by the piezoceramic
material and the flexure design.
If larger forces are applied,
damage to the piezoceramic,
the flexures or the sensor can
occur. The force limit must also
be considered in dynamic
applications.
Example: the dynamic forces
generated by sinusoidal opera-
tion at 500 Hz, 20 µm peak-to-
peak, 1 kg moved mass, are
approximately ±100 N. For
details see the tutorial
Piezoelectrics in Positioning
section (see p. 2-171 ff ).
Load capacity
Maximum vertical load, when the
stage is mounted horizontally.
Limited by the flexures or the load
capacity of the piezo actuators.
Lateral force limit
Maximum lateral force orthog-
onal to the operating direction.
Limited by the piezoceramics
and the flexures. For XY stages
the push/pull force capacity of
the other module (in its operat-
ing direction) limits the lateral
force that can be tolerated.
Mechanical properties
Straightness / Flatness /
Crosstalk
Typical linear off-axis error;
sometimes associated with a
particular motion axis, as in
Crosstalk (Z motion).
Torque limit (?
X
, ?
Y
, ?
Z
)
Maximum torque that can be
applied to the system before
damage occurs. Limited by the
piezo ceramics and the flexures
2-79
Piezo Nano Positioning
Piezo Flexure Stages /
High-Speed Scanning Systems
Nanopositioning / Piezoelectrics
Linear Actuators & Motors
Fast Steering Mirrors /
Active Optics
Piezo Drivers /
Servo Controllers
Piezoelectrics in Positioning
Nanometrology
Micropositioning
Linear
Vertical & Tip/Tilt
2- and 3-Axis
6-Axis
Single-Channel
Multi-Channel
Modular
Accessories
Index
Electrical capacitance
The piezo capacitance values
indicated in the technical data
tables are small-signal values
(measured at 1 V, 1000 Hz,
20 °C, no load). Large-signal
values at room temperature
are 30 to 50 % higher. The
capa citance of piezoceramics
changes with amplitude, tem-
perature, and load, up to 200 %
of the unloaded, small-signal
capacitance at room tempera-
Drive properties
Operating temperature range
Typically -20 to +80 °C, the
temperature range indicates
where the piezo stage may be
operated without damage.
Nevertheless, recalibration or
zero-point-adjustment may be
required if the system is operat-
ed at different temperatures.
Performance specifications are
valid for room temperature
range.
Material
Flexure stages are usually
made of anodized aluminum or
stainless steel. Small amounts
of other materials may be used
internally (for spring preload,
piezo coupling, mounting, ther-
mal compensation, etc.).
Al: Aluminum
N-S: Non-magnetic stainless
steel
S: Ferromagnetic stainless
steel
I: Invar
T: Titanium
Voltage connection
Standard operating voltage
connectors are LEMO and sub-
D type connectors.
Low-voltage piezos :
LEMO FFA.00.250, male.
Cable: coaxial, RG 178, Teflon
coated, 1 m
Sub-D special connectors
include lines for stage ID infor-
mation used by digital con-
trollers with AutoCalibration
function
Sensor connection
Standard sensor connectors
are LEMO and sub-D type con-
nectors.
Sub-D special connectors con-
tain both piezo voltage and
sensor connections.
For extension cables and
adapters, see Accessories p.
2-89 ff, in the Piezo Drivers /
Servo Controllers section.
Miscellaneous
ture. For detailed information
on power requirements, refer
to the amplifier frequency-
response graphs in the Piezo
Drivers / Servo Controllers
(see p. 2-99 ff ) section of this
catalog.
Dynamic Operating Current
Coefficient (DOCC)
Average electrical current (sup-
plied by the amplifier) required
to drive a piezo actuator per
unit frequency and unit dis-
placement (sine-wave opera-
tion). For example to find out if
a selected amplifier can drive a
given piezo stage at 50 Hz with
30 µm amplitude, multiply DOC
coefficient by 50 x 30 and check
if the result is smaller or equal
to the output current of the
selected amplifier. For details
see the tutorial Piezoelectrics
in Positioning section (see
p. 2-169 ff ).
www.pionline.it, www.pifrance.fr, www.pi-china.cn, www.goa-tech.co.il, www.alt.nl, www.bfioptilas.es, www.pi.ws, www.piceramic.de, www.pi-usa.us, www.pi-usa.us, www.pi-japan.jp, www.pi-japan.jp, www.physikinstrumente.co.uk, www.dyneos.ch, www.parameter.se, dms@deepms.com, www.deepms.com, www.warsash.com.au, www.parameter.se, www.eliovac.com.ar, www.rsdobrasil.com.br, www.woojoohitech.com, www.cairnhill.com, www.tetmakina.com, Seewww.piceramic.com, Seep.1-94ff.andwww.piceramic.com, Seewww.piceramic.com, Seealsowww.piceramic.com, andoscillatingmotione.g.in, info@pi-usa.us, www.pi-usa.us, info@pi-usa.us, www.pi-usa.us, info@pi-japan.jp, www.pi-japan.jp, info@pi-japan.jp, www.pi-japan.jp, info@pi-china.cn, www.pi-china.cn, info@pifrance.fr, www.pifrance.fr, uk@pi.ws, www.physikinstrumente.co.uk, info@pionline.it, www.pionline.it, info@piceramic.de, www.piceramic.de,
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